Patterning of hybrid titania film using photopolymerization

Thin Solid Films

Volumn 466, Issue 1-2, 2004, Pages 48-53

  Segawa, Hiroyo ^a   Tateishi, Kanayo ^b   Arai, Yasuhiko ^b   Yoshida, Kazuaki ^c   Kaji, Hironori ^d  

^a HOKKAIDO UNIVERSITY   (Japan)

^b OITA UNIVERSITY   (Japan)

^c NIPPON BUNRI UNIVERSITY   (Japan)

^d KYOTO UNIVERSITY   (Japan)

Author keywords

Fine patterning; Hybrid titania film; Ring opening polymerization; Sol gel; UV irradiation

Indexed keywords

CHEMICAL BONDS; IRRADIATION; PHOTOPOLYMERIZATION; REFRACTIVE INDEX; SOL-GELS; SYNTHESIS (CHEMICAL); TITANIUM COMPOUNDS; ULTRAVIOLET RADIATION;

FINE PATTERNING; HYBRID TITANIA FILMS; ORGANIC GROUPS; UV IRRADIATION;

THIN FILMS;

EID: 4544236634     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.01.111     Document Type: Article

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