Microlens arrays on large area UV transparent hybrid sol-gel materials for optical tools

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1143-1146

  Dal Zilio, Simone ^a   Della Giustina, Gioia ^b   Brusatin, Giovanna ^b   Tormen, Massimo ^a  

^a LABORATORIO TASC   (Italy)

^b UNIVERSITY OF PADOVA   (Italy)

Author keywords

Embossing; Epoxy; Glycidoxypropyltrimethoxysilane; Hybrid organic inorganic materials; Microlenses; Replica moulding; Sol gel

Indexed keywords

CHEMICAL DEGRADATION; EPOXY; GLYCIDOXYPROPYLTRIMETHOXYSILANE; HYBRID ORGANIC-INORGANIC MATERIALS; HYBRID SOL-GEL MATERIALS; LITHOGRAPHIC PROCESSING; MICRO-LENS ARRAYS; NANOIMPRINTING TECHNOLOGY; NANOSTRUCTURED SURFACE; OPTICAL APPLICATIONS; OPTICAL TOOLS; ORGANIC-INORGANIC SOL-GEL; SHAPE STABILITY; SOL-GEL MATERIALS; SOL-GEL SYSTEMS; THERMOPLASTIC POLYMER; UV REGION;

CHEMICAL STABILITY; COMPUTER CRIME; DEGRADATION; GELS; HYBRID MATERIALS; LITHOGRAPHY; MECHANICAL PROPERTIES; MICROLENSES; MICROOPTICS; MOLDING; OPTICAL INSTRUMENT LENSES; OPTICAL PROPERTIES; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLS;

DIELECTRIC MATERIALS;

EID: 76949092905     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.10.045     Document Type: Article

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