Replication of optical MEMS structures in sol-gel materials

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 157-160

  Obi, S ^a   Gale, M T ^a   Kuoni, A ^b   De Rooij, N ^b  

^a CSEM   (Switzerland)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Optical MEMS; ORMOCER; Replication; Sol gel; UV embossing

Indexed keywords

DEPOSITION; MOLDING; MONOLITHIC INTEGRATED CIRCUITS; PHOTOLITHOGRAPHY; SHRINKAGE; SILICON; SOL-GELS;

OPTICAL MEMS; ORMOCER; REPLICATION; UV-EMBOSSING;

MICROELECTROMECHANICAL DEVICES;

EID: 17344384326     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00091-7     Document Type: Conference Paper

References (8)

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2. ® is a registered trademark of the Fraunhofer-Gesellschaft.
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