UV-nanoimprinting lithography of Bragg Gratings on hybrid sol-gel based channel waveguides

Solid State Sciences

Volumn 12, Issue 11, 2010, Pages 1886-1889

  Prosposito, P ^a   Casalboni, M ^a   Orsini, E ^a   Palazzesi, C ^a   Stella, F ^a  

^a UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

Gratings; Hybrid sol gel materials; Laser interference lithography; Optical filters; UV nanoimprinting

Indexed keywords

CHANNEL GRATING; CHANNEL WAVEGUIDE; GRATINGS; HYBRID SOL-GEL; HYBRID SOL-GEL COATINGS; HYBRID SOL-GEL MATERIALS; LASER INTERFERENCE; LASER INTERFERENCE LITHOGRAPHY; LITHOGRAPHIC PROCESS; LOADED WAVEGUIDES; MORPHOLOGICAL CHARACTERIZATION; NANO-IMPRINTING; NANOIMPRINTING LITHOGRAPHY; POLYDIMETHYLSILOXANE PDMS; PROPYL METHACRYLATE; SINGLE-STEP; SOFT LITHOGRAPHY; SOLGEL FILMS; TITANIUM-BASED;

GELS; OPTICAL FILTERS; PHOTOLITHOGRAPHY; PLASMA FILLED WAVEGUIDES; POLYMER BLENDS; SILICONES; SOL-GEL PROCESS; SOL-GELS; SOLS; TITANIUM;

HYBRID MATERIALS;

EID: 77958505866     PISSN: 12932558     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solidstatesciences.2010.03.014     Document Type: Conference Paper

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