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Journal of Vacuum Science and Technology B

Volumn 29, Issue 6, 2011, Pages

Charging effects during focused electron beam induced deposition of silicon oxide

(3) De Boer, Sanne K a Van Dorp, Willem F a De Hosson, Jeff Th M a

a UNIVERSITY OF GRONINGEN (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRON BEAMS; SILICON OXIDES;

CHARGING EFFECT; FOCUSED ELECTRON BEAM INDUCED DEPOSITION;

SILICON COMPOUNDS;

EID: 84255172423 PISSN: 21662746 EISSN: 21662754 Source Type: Journal
DOI: 10.1116/1.3659713 Document Type: Article

Times cited : (6)

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