Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3144-3147

  Bauerdick, S ^a   Linden, A ^a   Stampfer, C ^b   Helbling, T ^b   Hierold, C ^b  

^a RAITH GmbH   (Germany)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL DEVICES; PATTERN RECOGNITION; SCANNING ELECTRON MICROSCOPY; SUSPENSIONS (FLUIDS);

DIRECT PATTERNING; ELECTRON BEAM INDUCED DEPOSITION (EBID); NANOELECTROMECHANICAL SYSTEMS (NEMS);

CARBON NANOTUBES;

EID: 33845252952     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2388965     Document Type: Article

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