Charging phenomena in dielectric/semiconductor heterostructures during x-ray photoelectron spectroscopy measurements

Journal of Applied Physics

Volumn 110, Issue 5, 2011, Pages

  Perego, M ^a   Seguini, G ^a  

^a LABORATORIO MDM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BAND ALIGNMENTS; BAND OFFSETS; CORE LINES; DIFFERENTIAL CHARGING; ENERGY SCALE; INTERNAL PHOTOEMISSION; PHYSICAL MODEL; SI SUBSTRATES; STEADY STATE; TIME EVOLUTIONS; VALENCE BAND OFFSETS; XPS MEASUREMENTS;

AMORPHOUS FILMS; AMORPHOUS SILICON; BINDING ENERGY; GATE DIELECTRICS; HAFNIUM; HAFNIUM OXIDES; HETEROJUNCTIONS; PHOTONS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 80052926383     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3624757     Document Type: Conference Paper

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