SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface and Interface Analysis

Volumn 36, Issue 7, 2004, Pages 619-623

XPS analysis with external bias: A simple method for probing differential charging

(2) Ertas, Gulay a Suzer, Sefik a

a BILKENT UNIVERSITY (Turkey)

Author keywords

Dielectric constant; Differential charging; External biasing; Metal oxides

Indexed keywords

ALUMINA; BINDING ENERGY; GATES (TRANSISTOR); HAFNIUM; PERMITTIVITY; SILICA; SUBSTRATES; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHEMICAL SHIFTS; DIFFERENTIAL CHARGING; EXTERNAL BIASING; METAL OXIDES;

SURFACE CHEMISTRY;

EID: 3242739970 PISSN: 01422421 EISSN: None Source Type: Journal
DOI: 10.1002/sia.1839 Document Type: Article

Times cited : (23)

References (47)

1
- 0015159399
- Hnatowich DJ, Hudis J, Perlman ML, Ragaini RC. J. Appl. Phys. 1971; 42: 4883.
- (1971) J. Appl. Phys. , vol.42 , pp. 4883
- Hnatowich, D.J.¹ Hudis, J.² Perlman, M.L.³ Ragaini, R.C.⁴

2
- 0345237089
- Cros AJ. J. Electron Spectrosc. Relat. Phenom. 1992; 59:1.
- (1992) J. Electron Spectrosc. Relat. Phenom. , vol.59 , pp. 1
- Cros, A.J.¹

3
- 0028529518
- Bart F, Guittet MJ, Thromat N, Gautier M, Duraud JP. J. Electron Spectrosc. Relat. Phenom. 1994; 69: 245.
- (1994) J. Electron Spectrosc. Relat. Phenom. , vol.69 , pp. 245
- Bart, F.¹ Guittet, M.J.² Thromat, N.³ Gautier, M.⁴ Duraud, J.P.⁵

4
- 0003530125
- CRC press: Boca Raton
- Barr TL. Modern ESCA: the Principles and Practice of X-Ray Photoelectron Spectroscopy. CRC press: Boca Raton, 1994.
- (1994) Modern ESCA: The Principles and Practice of X-Ray Photoelectron Spectroscopy
- Barr, T.L.¹

5
- 0032092494
- Verecke G, Rouxhet PG. Surf. Interface Anal. 1998; 26: 490.
- (1998) Surf. Interface Anal. , vol.26 , pp. 490
- Verecke, G.¹ Rouxhet, P.G.²

6
- 0001097135
- Cazaux J. J. Electron Spectrosc. Relat. Phenom. 1999; 105:155.
- (1999) J. Electron Spectrosc. Relat. Phenom. , vol.105 , pp. 155
- Cazaux, J.¹

7
- 0034544210
- Cazaux J. J. Electron Spectrosc. Relat. Phenom. 2000; 113:15.
- (2000) J. Electron Spectrosc. Relat. Phenom. , vol.113 , pp. 15
- Cazaux, J.¹

8
- 0038763174
- Thomas III JH, Bryson III, CE, Pampalone TR. J. Vac. Sci. Technol. B 1988; 6:1097.
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1097
- Thomas III, J.H.¹ Bryson III, C.E.² Pampalone, T.R.³

9
- 0037748888
- Lau WM. J. Appl. Phys. 1989; 65: 2047.
- (1989) J. Appl. Phys. , vol.65 , pp. 2047
- Lau, W.M.¹

10
- 0013248964
- Lau WM. Appl. Phys. Lett. 1989; 54: 338.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 338
- Lau, W.M.¹

11
- 0037748889
- Lau WM. J. Appl. Phys. 1990; 67:1504.
- (1990) J. Appl. Phys. , vol.67 , pp. 1504
- Lau, W.M.¹

12
- 0010795729
- Lau WM, Jin S, Wu XW, Ingrey S. J. Vac. Sci. Technol. B 1990; 8: 848.
- (1990) J. Vac. Sci. Technol. B , vol.8 , pp. 848
- Lau, W.M.¹ Jin, S.² Wu, X.W.³ Ingrey, S.⁴

13
- 0026413018
- Lau W, Wu XW. Surf. Sci. 1991; 245: 345.
- (1991) Surf. Sci. , vol.245 , pp. 345
- Lau, W.¹ Wu, X.W.²

14
- 0038763173
- Chan RWM, Kwok RWM, Lau WM. J. Appl. Phys. 1996; 79: 3635.
- (1996) J. Appl. Phys. , vol.79 , pp. 3635
- Chan, R.W.M.¹ Kwok, R.W.M.² Lau, W.M.³

15
- 0031536044
- Chan RWM, Kwok RWM, Lau WM, Van H, Wong SP. J. Vac. Sci. Technol. A 1997; 15: 2787.
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 2787
- Chan, R.W.M.¹ Kwok, R.W.M.² Lau, W.M.³ Van, H.⁴ Wong, S.P.⁵

16
- 0034709435
- Shabtai K, Rubinstein I, Cohen SR, Cohen H. J. Am. Chem. Soc. 2000; 122: 4959.
- (2000) J. Am. Chem. Soc. , vol.122 , pp. 4959
- Shabtai, K.¹ Rubinstein, I.² Cohen, S.R.³ Cohen, H.⁴

17
- 0034721147
- Doron-Mor I, Hatzor A, Vaskevich A, van der Boom-Moav T, Shanzer A, Rubinstein I, Cohen H. Nature 2000; 406: 382.
- (2000) Nature , vol.406 , pp. 382
- Doron-Mor, I.¹ Hatzor, A.² Vaskevich, A.³ Van Der Boom-Moav, T.⁴ Shanzer, A.⁵ Rubinstein, I.⁶ Cohen, H.⁷

18
- 0038056020
- Ulgut B, Suzer S. J. Phys. Chem. B 2003; 107: 2939.
- (2003) J. Phys. Chem. B , vol.107 , pp. 2939
- Ulgut, B.¹ Suzer, S.²

19
- 0037748892
- Clarke RA, Tapping RL, Hopper MA, Young Y. J. Electrochem. Soc. 1975; 122:1348.
- (1975) J. Electrochem. Soc. , vol.122 , pp. 1348
- Clarke, R.A.¹ Tapping, R.L.² Hopper, M.A.³ Young, Y.⁴

20
- 0345986409
- Hollinger G, Jugnet Y, Pertosa P, Duc TM. Chem. Phys. Lett. 1975; 36: 441.
- (1975) Chem. Phys. Lett. , vol.36 , pp. 441
- Hollinger, G.¹ Jugnet, Y.² Pertosa, P.³ Duc, T.M.⁴

21
- 24244435111
- Grunthaner FJ, Grunthaner PJ, Vasquez RP, Lewis BF, Maserjian J, Madhukar A. Phys. Rev. Lett. 1979; 43:1683.
- (1979) Phys. Rev. Lett. , vol.43 , pp. 1683
- Grunthaner, F.J.¹ Grunthaner, P.J.² Vasquez, R.P.³ Lewis, B.F.⁴ Maserjian, J.⁵ Madhukar, A.⁶

22
- 0018522041
- Grunthaner FJ, Grunthaner PJ, VasquezRP, Lewis BF, Maserjian J, Madhukar A. J. Vac. Sci. Technol. 1979; 16:1443.
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 1443
- Grunthaner, F.J.¹ Grunthaner, P.J.² Vasquez, R.P.³ Lewis, B.F.⁴ Maserjian, J.⁵ Madhukar, A.⁶

23
- 0001059493
- Ishizaka A, Iwata S, Kamigaki Y. Surf. Sci. 1979; 84:355.
- (1979) Surf. Sci. , vol.84 , pp. 355
- Ishizaka, A.¹ Iwata, S.² Kamigaki, Y.³

24
- 0019587892
- Hollinger G. Appl. Surf. Sci. 1981; 8: 318.
- (1981) Appl. Surf. Sci. , vol.8 , pp. 318
- Hollinger, G.¹

25
- 0021177532
- Hollinger G, Himpsel JF. Appl. Phys. Lett. 1983; 44: 93.
- (1983) Appl. Phys. Lett. , vol.44 , pp. 93
- Hollinger, G.¹ Himpsel, J.F.²

26
- 0021409606
- Wagner CD, Joshi A, Gulbrandsen L, Deal BE. J. Vac. Sci. Technol. B 1984; 2:107.
- (1984) J. Vac. Sci. Technol. B , vol.2 , pp. 107
- Wagner, C.D.¹ Joshi, A.² Gulbrandsen, L.³ Deal, B.E.⁴

27
- 0001327850
- Finster J, Schulze D, Bechstedt F, Meisel A. Surf. Sci. 1985; 152/153:1063.
- (1985) Surf. Sci. , vol.152-153 , pp. 1063
- Finster, J.¹ Schulze, D.² Bechstedt, F.³ Meisel, A.⁴

28
- 0038763177
- Iqbal A, Bates Jr CW, Allen JW. Appl. Phys. Lett. 1985; 47: 93.
- (1985) Appl. Phys. Lett. , vol.47 , pp. 93
- Iqbal, A.¹ Bates Jr., C.W.² Allen, J.W.³

29
- 0022957868
- Grunthaner FJ, Grunthaner PJ. Mater. Sci. Rep. 1986; 1: 65.
- (1986) Mater. Sci. Rep. , vol.1 , pp. 65
- Grunthaner, F.J.¹ Grunthaner, P.J.²

30
- 0030151904
- Iwata S, Ishizaka A. J. Appl. Phys. 1996; 79: 6653.
- (1996) J. Appl. Phys. , vol.79 , pp. 6653
- Iwata, S.¹ Ishizaka, A.²

31
- 0000914137
- Zhang KZ, Greeley JN, Banaszak Holl MM, McFeely FR. J. Appl. Phys. 1997; 82: 2298.
- (1997) J. Appl. Phys. , vol.82 , pp. 2298
- Zhang, K.Z.¹ Greeley, J.N.² Banaszak Holl, M.M.³ McFeely, F.R.⁴

32
- 0000513790
- Zhang KZ, Banaszak Holl MM, McFeely FR. J. Phys. Chem. B 1998; 102: 3930.
- (1998) J. Phys. Chem. B , vol.102 , pp. 3930
- Zhang, K.Z.¹ Banaszak Holl, M.M.² McFeely, F.R.³

33
- 0000355408
- 198
- Kobayashi H, Kubota T, Kawa H, Nakato Y, Nishiyama N. Appl Phys. Lett. 198; 73: 933.
- Appl Phys. Lett. , vol.73 , pp. 933
- Kobayashi, H.¹ Kubota, T.² Kawa, H.³ Nakato, Y.⁴ Nishiyama, N.⁵

34
- 0000145428
- Browning R, Sobolewski MA, Helms CR. Phys. Rev. B 1988; 38: 13407.
- (1988) Phys. Rev. B , vol.38 , pp. 13407
- Browning, R.¹ Sobolewski, M.A.² Helms, C.R.³

35
- 0000886539
- Pasquarello A, Hybertson MS, Car R. Phys. Rev. B 1996; 53: 10942.
- (1996) Phys. Rev. B , vol.53 , pp. 10942
- Pasquarello, A.¹ Hybertson, M.S.² Car, R.³

36
- 3242691859
- Sambe H, Ramaker DE. J. Vac. Sci Technol. A 1992; 10: 2291.
- (1992) J. Vac. Sci Technol. A , vol.10 , pp. 2291
- Sambe, H.¹ Ramaker, D.E.²

37
- 0030502745
- Wu Y, Garfunkel E, Madey TE. J. Vac. Sci. Technol. A 1996; 14: 2554.
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 2554
- Wu, Y.¹ Garfunkel, E.² Madey, T.E.³

38
- 0033701134
- Reiche R, Yubera F, Espinos JP, Gonzalez-Elippe AR. Surf. Sci. 2000; 457:199.
- (2000) Surf. Sci. , vol.457 , pp. 199
- Reiche, R.¹ Yubera, F.² Espinos, J.P.³ Gonzalez-Elippe, A.R.⁴

39
- 0037278845
- Suzer S, Sayan S, Banaszak Holl MM, Garfunkel E, Hussain Z, Hamdan MM. J. Vac. Sci. Technol. A 2003; 21:106.
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 106
- Suzer, S.¹ Sayan, S.² Banaszak Holl, M.M.³ Garfunkel, E.⁴ Hussain, Z.⁵ Hamdan, M.M.⁶

40
- 0034739021
- Kingon AI, Maria JP, Streuffer SK. Nature (London) 2000; 406: 1032.
- (2000) Nature (London) , vol.406 , pp. 1032
- Kingon, A.I.¹ Maria, J.P.² Streuffer, S.K.³

41
- 0038763171
- Dickinson T, Povey AF, Sherwood PMA. J. Electron Spectrosc. Relat. Phenom. 1973; 2: 441.
- (1973) J. Electron Spectrosc. Relat. Phenom. , vol.2 , pp. 441
- Dickinson, T.¹ Povey, A.F.² Sherwood, P.M.A.³

42
- 0001317747
- Johansson G, Hedman J, Bemdtsson A, Klasson M, Nilsson R. J. Electron Spectrosc. Relat. Phenom. 1973; 2:295.
- (1973) J. Electron Spectrosc. Relat. Phenom. , vol.2 , pp. 295
- Johansson, G.¹ Hedman, J.² Bemdtsson, A.³ Klasson, M.⁴ Nilsson, R.⁵

43
- 0000665095
- Howercraft NJ, Sherwood PMA. Surf. Interface Anal. 2000; 29: 232.
- (2000) Surf. Interface Anal. , vol.29 , pp. 232
- Howercraft, N.J.¹ Sherwood, P.M.A.²

44
- 0442311052
- Karadas F, Ertas G, Suzer S. J. Phys. Chem. B 2004; 108:1515.
- (2004) J. Phys. Chem. B , vol.108 , pp. 1515
- Karadas, F.¹ Ertas, G.² Suzer, S.³

45
- 0028202664
- Mitchell DF, Clark KB, Bardwell JA, Lennard WN, Massoumi GR, Mitchell IV. Surf. Interface Anal. 1994; 2: 44,
- (1994) Surf. Interface Anal. , vol.2 , pp. 44
- Mitchell, D.F.¹ Clark, K.B.² Bardwell, J.A.³ Lennard, W.N.⁴ Massoumi, G.R.⁵ Mitchell, I.V.⁶

46
- 0001718515
- Wagner CD, Joshi A. J. Electron Spectrosc. Relat. Phenom. 1988; 47: 283.
- (1988) J. Electron Spectrosc. Relat. Phenom. , vol.47 , pp. 283
- Wagner, C.D.¹ Joshi, A.²

47
- 0003872122
- John Wiley: New York
- Callister Jr WD. Materials Science and Engineering: an Introduction (2nd edn). John Wiley: New York, 1991.
- (1991) Materials Science and Engineering: An Introduction (2nd Edn)
- Callister Jr., W.D.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.