XPS: Binding energy calibration of electron spectrometers 4 - Assessment of effects for different x-ray sources, analyser resolutions, angles of emission and overall uncertainties

Surface and Interface Analysis

Volumn 26, Issue 9, 1998, Pages 617-641

  Seah, M P ^a   Gilmore, I S ^a   Spencer, S J ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

Binding energy; Calibration; Reference energies; XPS

Indexed keywords

ALUMINUM; BINDING ENERGY; CALIBRATION; COPPER; ELECTROMAGNETIC WAVE EMISSION; FERMI LEVEL; GOLD; MAGNESIUM; MONOCHROMATORS; SILVER; X RAY SPECTROMETERS;

GAUSSIAN SPECTROMETERS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 0032136348     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199808)26:9<617::AID-SIA407>3.0.CO;2-V     Document Type: Article

References (34)

1. C. D. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder and G. Muilenberg, Handbook of X-ray Photoelectron Spectroscopy. Perkin-Elmer, MN (1979).
2. C. D. Wagner, in Practical Surface Analysis, Vol 1 : Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs and M. P. Seah, p. 595, Wiley, Chichester (1990).
3. J. R. Rumble, D. M. Bickham and C. J. Powell, Surf. Interface Anal. 19, 241 (1992).
4. J. F. Moulder, W. F. Stickle, P. E. Sobol and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy. Perkin-Elmer, Eden Prairie, MN (1992).
5. C. J. Powell, N. E. Erickson and T. E. Madey, J. Electron Spectrosc. 17,361 (1979).
6. M. T. Anthony and M. P. Seah, Surf. Interface Anal. 6, 107 (1984) (paper 2 of this series).
7. M. T. Anthony and M. P. Seah, Surf. Interface Anal. 6, 95 (1984) (paper 1 of this series).
8. M. P. Seah. J. Vac. Sci. Technol. A 3, 1330 (1985).
9. M. P. Seah, Surf. Interface Anal. 14, 488 (1989) (paper 3 of this series).
10. C. J. Powell, Surf. Interface Anal. 23, 121 (1995).
11. J. Schweppe, R. D. Deslattes, T. Mooney and C. J. Powell, J. Electron Spectrosc. 67, 463 (1994).
12. C. Klauber, Surf. Interface Anal. 20, 703 (1993).
13. M. P. Seah, Surf. Interface Anal. 2, 222 (1980).
14. P. H. Citrin, G. K. Wertheim and Y. Baer, Phys. Rev. B 27, 3160 (1983).
15. ISO/TC 201/SC7 WG2 Working Draft, Surface chemical analysis - x-ray photoelectron spectroscopy - calibration of energy scales.
16. M. P. Seah, I. S. Gilmore and G. Beamson, Surf. Interface Anal. 26, 642 (1998).
17. P. J. Cumpson, M. P. Seah and S. J. Spencer, Surf. Interface Anal. 24, 687 (1996).
18. M. P. Seah, G. C. Smith and M. T. Anthony, Surf. Interface Anal. 15, 293 (1990).
19. P. Coxon, J. Krizek, M. Humpherson and I. M. Wardell, J. Electron Spectrosc. 52, 821 (1990).
20. M. P. Seah and G. C. Smith, Surf. Interface Anal. 15, 751 (1990).
21. R. L Chaney, Surf. Interface Anal. 10, 36 (1987).
22. U. Gelius, private communication (1990).
23. M. P. Seah and I. S. Gilmore, J. Electron Spectrosc. 83, 197 (1997).
24. H. D. Polaschegg., Appl. Phys. 4, 63 (1974).
25. J. Osterwalder, M. Sagurton, P. J. Orders, C. S. Fadley, B. D. Hermsmeier and D. J. Friedman, J. Electron Spectrosc. 48, 55 (1989).
26. U. Gelius, B. Wannberg, P. Baltzer, H. Fellner-Feldegg, G. Carlsson, C. G. Johansson, J. Larsson, P. Münger and G. Vegefors, J. Electron Spectrosc. 52, 747 (1990).
27. K. Asami, J. Electron Spectrosc. 9, 469 (1976).
28. W. F. Egelhoff, Surf. Sci. Rep. 6, 253 (1987).
29. M. P. Seah, S. J. Spencer, F. Bodino and J, J. Pireaux, J. Electron Spectrosc. 87, 159 (1997).
30. C. J. Powell, Surf. Interface Anal. 25, 777 (1997).
31. M. P. Seah, J. Vac. Sci. Technol. A 15, 485 (1997).
32. P. J. Cumpson and M. P. Seah, Surf. Interface Anal. 18, 345 (1992).
33. M. P. Seah and M. T. Brown, J. Electron Spectrosc., to be published.
34. M. P. Seah, in Practical Surface Analyses Vol. 1: Auger and X-ray Photoelectron Spectroscopy, ed. by D. Briggs and M. P. Seah, p. 541, Wiley, Chichester (1990).