-
2
-
-
0242509113
-
-
JVTAD6 0734-2101 10.1116/1.1600453
-
D. G. Cahill, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.1600453 21, S110 (2003).
-
(2003)
J. Vac. Sci. Technol. A
, vol.21
, pp. 110
-
-
Cahill, D.G.1
-
3
-
-
4243123805
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.60.424
-
A. Mazor, D. J. Srolovitz, P. S. Hagan, and B. G. Bukiet, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.60.424 60, 424 (1988).
-
(1988)
Phys. Rev. Lett.
, vol.60
, pp. 424
-
-
Mazor, A.1
Srolovitz, D.J.2
Hagan, P.S.3
Bukiet, B.G.4
-
8
-
-
0043031301
-
-
0734-2101 10.1116/1.1564037
-
D. H. Levi, B. P. Nelson, J. D. Perkins, and H. R. Moutinho, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1564037 21, 1545 (2003).
-
(2003)
J. Vac. Sci. Technol. A
, vol.21
, pp. 1545
-
-
Levi, D.H.1
Nelson, B.P.2
Perkins, J.D.3
Moutinho, H.R.4
-
11
-
-
32644448207
-
Substrate temperature dependence of the roughness evolution of HWCVD a-Si:H studied by real-time spectroscopic ellipsometry
-
DOI 10.1016/j.tsf.2005.07.113, PII S0040609005009788, Proceedings of the Third International Conference on Hot-Wire
-
W. M. M. Kessels, J. P. M. Hoefnagels, E. Langereis, and M. C. M. van de Sanden, Thin Solid Films THSFAP 0040-6090 10.1016/j.tsf.2005.07.113 501, 88 (2006). (Pubitemid 43242996)
-
(2006)
Thin Solid Films
, vol.501
, Issue.1-2
, pp. 88-91
-
-
Kessels, W.M.M.1
Hoefnagels, J.P.M.2
Langereis, E.3
Van De Sanden, M.C.M.4
-
12
-
-
33748847697
-
-
I.-Y. Kim, S.-H. Hong, A. Consoli, J. Benedikt, and A. von Keudell, J. Appl. Phys. 100, (2006).
-
(2006)
J. Appl. Phys.
, vol.100
-
-
Kim, I.-Y.1
Hong, S.-H.2
Consoli, A.3
Benedikt, J.4
Von Keudell, A.5
-
13
-
-
33847756721
-
Kinetic roughening of amorphous silicon during hot-wire chemical vapor deposition at low temperature
-
DOI 10.1063/1.2424527
-
B. A. Sperling and J. R. Abelson, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.2424527 101, 024915 (2007). (Pubitemid 46372887)
-
(2007)
Journal of Applied Physics
, vol.101
, Issue.2
, pp. 024915
-
-
Sperling, B.A.1
Abelson, J.R.2
-
15
-
-
35949035159
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.20.3292
-
D. E. Aspnes and J. B. Theeten, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.20.3292 20, 3292 (1979).
-
(1979)
Phys. Rev. B
, vol.20
, pp. 3292
-
-
Aspnes, D.E.1
Theeten, J.B.2
-
16
-
-
0001642363
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.61.10832
-
H. Fujiwara, J. Koh, P. I. Rovira, and R. W. Collins, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.61.10832 61, 10832 (2000).
-
(2000)
Phys. Rev. B
, vol.61
, pp. 10832
-
-
Fujiwara, H.1
Koh, J.2
Rovira, P.I.3
Collins, R.W.4
-
17
-
-
0001219364
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.60.16950
-
S. G. Mayr, M. Moske, and K. Samwer, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.60.16950 60, 16950 (1999).
-
(1999)
Phys. Rev. B
, vol.60
, pp. 16950
-
-
Mayr, S.G.1
Moske, M.2
Samwer, K.3
-
18
-
-
0037104349
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.66.075329
-
T. Karabacak, Y. P. Zhao, G.-C. Wang, and T.-M. Lu, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.66.075329 66, 075329 (2002).
-
(2002)
Phys. Rev. B
, vol.66
, pp. 075329
-
-
Karabacak, T.1
Zhao, Y.P.2
Wang, G.-C.3
Lu, T.-M.4
-
19
-
-
0042028048
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.67.245416
-
F. Ojeda, R. Cuerno, R. Salvarezza, F. Agulló-Rueda, and L. Vázquez, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.67.245416 67, 245416 (2003).
-
(2003)
Phys. Rev. B
, vol.67
, pp. 245416
-
-
Ojeda, F.1
Cuerno, R.2
Salvarezza, R.3
Agulló-Rueda, F.4
Vázquez, L.5
-
20
-
-
34547838363
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.76.075314
-
A. Yanguas-Gil, J. Cotrino, A. Walkiewicz-Pietrzykowska, and A. R. González-Elipe, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.76.075314 76, 075314 (2007).
-
(2007)
Phys. Rev. B
, vol.76
, pp. 075314
-
-
Yanguas-Gil, A.1
Cotrino, J.2
Walkiewicz-Pietrzykowska, A.3
González-Elipe, A.R.4
-
21
-
-
0030211909
-
-
APPLAB 0003-6951 10.1063/1.117397
-
J. Koh, Y. W. Lu, C. R. Wronski, Y. L. Kuang, R. W. Collins, T. T. Tsong, and Y. E. Strausser, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.117397 69, 1297 (1996).
-
(1996)
Appl. Phys. Lett.
, vol.69
, pp. 1297
-
-
Koh, J.1
Lu, Y.W.2
Wronski, C.R.3
Kuang, Y.L.4
Collins, R.W.5
Tsong, T.T.6
Strausser, Y.E.7
-
22
-
-
0032473236
-
-
THSFAP 0040-6090 10.1016/S0040-6090(97)00349-0
-
P. Petrik, L. P. Biró, M. Fried, T. Lohner, R. Berger, C. Schneider, J. Gyulai, and H. Ryssel, Thin Solid Films THSFAP 0040-6090 10.1016/S0040-6090(97)00349-0 315, 186 (1998).
-
(1998)
Thin Solid Films
, vol.315
, pp. 186
-
-
Petrik, P.1
Biró, L.P.2
Fried, M.3
Lohner, T.4
Berger, R.5
Schneider, C.6
Gyulai, J.7
Ryssel, H.8
-
23
-
-
0000859415
-
-
JAPIAU 0021-8979 10.1063/1.372085
-
P. Petrik, T. Lohner, M. Fried, L. P. Biró, N. Q. Khánh, J. Gyulai, W. Lehnert, C. Schneider, and H. Ryssel, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.372085 87, 1734 (2000).
-
(2000)
J. Appl. Phys.
, vol.87
, pp. 1734
-
-
Petrik, P.1
Lohner, T.2
Fried, M.3
Biró, L.P.4
Khánh, N.Q.5
Gyulai, J.6
Lehnert, W.7
Schneider, C.8
Ryssel, H.9
-
24
-
-
0034904138
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.63.115306
-
H. Fujiwara, M. Kondo, and A. Matsuda, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.63.115306 63, 115306 (2001).
-
(2001)
Phys. Rev. B
, vol.63
, pp. 115306
-
-
Fujiwara, H.1
Kondo, M.2
Matsuda, A.3
-
26
-
-
0013369367
-
-
APOPAI 0003-6935 10.1364/AO.37.007334
-
J. Isidorsson, C. G. Granqvist, K. von Rottkay, and M. Rubin, Appl. Opt. APOPAI 0003-6935 10.1364/AO.37.007334 37, 7334 (1998).
-
(1998)
Appl. Opt.
, vol.37
, pp. 7334
-
-
Isidorsson, J.1
Granqvist, C.G.2
Von Rottkay, K.3
Rubin, M.4
-
27
-
-
80052441791
-
-
Ph.D. dissertation, University of Illinois at Urbana-Champaign
-
B. A. Sperling, Ph.D. dissertation, University of Illinois at Urbana-Champaign, 2006.
-
(2006)
-
-
Sperling, B.A.1
-
28
-
-
11744257049
-
-
JMOPEW 0950-0340 10.1080/09500349808230887
-
D. Franta and I. Ohlídal, J. Mod. Opt. JMOPEW 0950-0340 10.1080/09500349808230887 45, 903 (1998).
-
(1998)
J. Mod. Opt.
, vol.45
, pp. 903
-
-
Franta, D.1
Ohlídal, I.2
-
29
-
-
16244380499
-
Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces
-
DOI 10.1016/j.optcom.2004.12.016, PII S0030401804012908
-
D. Franta and I. Ohlídal, Opt. Commun. OPCOB8 0030-4018 10.1016/j.optcom.2004.12.016 248, 459 (2005). (Pubitemid 40454523)
-
(2005)
Optics Communications
, vol.248
, Issue.4-6
, pp. 459-467
-
-
Franta, D.1
Ohlidal, I.2
-
30
-
-
0001066994
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.48.14472
-
G. Palasantzas, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.48.14472 48, 14472 (1993).
-
(1993)
Phys. Rev. B
, vol.48
, pp. 14472
-
-
Palasantzas, G.1
-
31
-
-
33646635275
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.49.5785
-
G. Palasantzas, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.49.5785 49, 5785 (1994).
-
(1994)
Phys. Rev. B
, vol.49
, pp. 5785
-
-
Palasantzas, G.1
-
32
-
-
0019539913
-
-
THSFAP 0040-6090 10.1016/0040-6090(82)90590-9
-
D. E. Aspnes, Thin Solid Films THSFAP 0040-6090 10.1016/0040-6090(82) 90590-9 89, 249 (1982).
-
(1982)
Thin Solid Films
, vol.89
, pp. 249
-
-
Aspnes, D.E.1
-
33
-
-
80052496086
-
-
in edited by H. G. Tompkins and E. A. Irene (Springer-Verlag, Heidelberg, Germany and William Andrew Publishing, Norwich, NY
-
G. E. Jellison Jr., in Handbook of Ellipsometry, edited by, H. G. Tompkins, and, E. A. Irene, (Springer-Verlag, Heidelberg, Germany and William Andrew Publishing, Norwich, NY, 2005), pp. 268-271.
-
(2005)
Handbook of Ellipsometry
, pp. 268-271
-
-
Jellison, Jr.G.E.1
-
34
-
-
11944271869
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.68.2814
-
Y.-M. Li, I. An, H. V. Nguyen, C. R. Wronski, and R. W. Collins, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.68.2814 68, 2814 (1992).
-
(1992)
Phys. Rev. Lett.
, vol.68
, pp. 2814
-
-
Li, Y.-M.1
An, I.2
Nguyen, H.V.3
Wronski, C.R.4
Collins, R.W.5
-
37
-
-
0031190893
-
-
PLEEE8 1539-3755 10.1103/PhysRevE.56.1254
-
G. Palasantzas, Phys. Rev. E PLEEE8 1539-3755 10.1103/PhysRevE.56.1254 56, 1254 (1997).
-
(1997)
Phys. Rev. e
, vol.56
, pp. 1254
-
-
Palasantzas, G.1
-
38
-
-
0000651734
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.84.3125
-
F. Ojeda, R. Cuerno, R. Salvarezza, and L. Vázquez, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.84.3125 84, 3125 (2000).
-
(2000)
Phys. Rev. Lett.
, vol.84
, pp. 3125
-
-
Ojeda, F.1
Cuerno, R.2
Salvarezza, R.3
Vázquez, L.4
-
39
-
-
0042407342
-
-
ARPLAP 0066-426X 10.1146/annurev.pc.45.100194.002153
-
W. M. Tong and R. S. Williams, Annu. Rev. Phys. Chem. ARPLAP 0066-426X 10.1146/annurev.pc.45.100194.002153 45, 401 (1994).
-
(1994)
Annu. Rev. Phys. Chem.
, vol.45
, pp. 401
-
-
Tong, W.M.1
Williams, R.S.2
-
41
-
-
0035880822
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.64.085323
-
T. Karabacak, Y. P. Zhao, G.-C. Wang, and T.-M. Lu, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.64.085323 64, 085323 (2001).
-
(2001)
Phys. Rev. B
, vol.64
, pp. 085323
-
-
Karabacak, T.1
Zhao, Y.P.2
Wang, G.-C.3
Lu, T.-M.4
-
44
-
-
0037080625
-
-
PLRBAQ 1098-0121 10.1103/PhysRevB.65.035311
-
K. R. Bray and G. N. Parsons, Phys. Rev. B PLRBAQ 1098-0121 10.1103/PhysRevB.65.035311 65, 035311 (2002).
-
(2002)
Phys. Rev. B
, vol.65
, pp. 035311
-
-
Bray, K.R.1
Parsons, G.N.2
-
46
-
-
0038496486
-
-
PRLTAO 0031-9007 10.1103/PhysRevLett.83.4594
-
J. M. López, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.83.4594 83, 4594 (1999).
-
(1999)
Phys. Rev. Lett.
, vol.83
, pp. 4594
-
-
López, J.M.1
-
47
-
-
80052434644
-
-
EASE Software (included data files)
-
J. A. Woollam Co., EASE Software (included data files).
-
-
-
Woollam, Co.J.A.1
|