Morphological instabilities in thin-film growth and etching

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 5, 2003, Pages

  Cahill, David G ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FILM GROWTH; SPUTTERING; STRESS ANALYSIS; ANNEALING; CRYSTAL GROWTH; CRYSTAL ORIENTATION; DEPOSITION; DIFFERENTIAL EQUATIONS; ELECTRON SPECTROSCOPY; EQUATIONS OF MOTION; PERTURBATION TECHNIQUES; SECONDARY ION MASS SPECTROMETRY; STRESSES; TEMPERATURE;

PATTERN FORMATION; ION-INDUCED VISCOSITY; LINEAR STABILITY ANALYSIS; THERMAL DIFFUSION CONSTANT; THIN-FILM GROWTH;

THIN FILMS; MORPHOLOGY;

EID: 0242509113     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1600453     Document Type: Conference Paper

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