SCOPUS 정보 검색 플랫폼

Physical Review B - Condensed Matter and Materials Physics

Volumn 65, Issue 3, 2002, Pages 353111-353118

Surface transport kinetics in low-temperature silicon deposition determined from topography evolution

(2) Bray, K R a Parsons, G N a

a North Carolina State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; GLASS; HELIUM; HYDROGEN; SILANE; SILICON;

ADSORPTION; ARTICLE; DIFFUSION; EXPERIMENTAL MODEL; FILM; LOW TEMPERATURE; MOLECULAR DYNAMICS; SURFACE PROPERTY; TEMPERATURE DEPENDENCE; THICKNESS; TRANSPORT KINETICS;

EID: 0037080625 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (62)

References (27)

1
- 0037941875
- (1985) J. Phys. A , vol.18
- Family, F.¹ Vicsek, T.²

2
- 0003431520
- Cambridge University Press, Cambridge
- (1995) Fractal Concepts in Surface Growth
- Barabasi, A.L.¹ Stanley, H.E.²

3
- 0042407342
- (1994) Annu. Rev. Phys. Chem. , vol.45 , pp. 401
- Tong, W.M.¹ Williams, R.S.²

4
- 0000182211
- (2000) J. Appl. Phys. , vol.87 , pp. 2608
- Robertson, J.¹

5
- 0032351436
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 278
- Perrin, J.¹ Shiratani, M.² Kae-Nune, P.³ Videlot, H.⁴ Jolly, J.⁵ Guillon, J.⁶

6
- 0027906879
- (1993) J. Non-Cryst. Solids , vol.164-166 , pp. 31
- Ganguly, G.¹ Matsuda, A.²

7
- 33744615630
- (1995) Phys. Rev. B , vol.51 , Issue.10 , pp. 635
- Maeda, K.¹ Kuroe, A.² Umezu, I.³

8
- 0002139241
- (1999) Thin Solid Films , vol.337 , pp. 1
- Matsuda, A.¹

9
- 0001006766
- (1987) J. Appl. Phys. , vol.62 , pp. 4763
- Kushner, M.J.¹

10
- 0000219813
- (1987) J. Appl. Phys. , vol.61 , pp. 2866
- Gleason, K.K.¹ Wang, K.S.² Chen, M.K.³ Reimer, J.A.⁴

11
- 36549092725
- (1986) J. Chem. Phys. , vol.85 , pp. 3623
- Robertson, R.¹ Gallagher, A.²

12
- 0000395405
- (1997) Phys. Rev. B , vol.56 , pp. 9887
- Reinker, B.¹ Moske, M.² Samwer, K.³

13
- 0343926434
- (1997) Phys. Rev. B , vol.56 , pp. 4085
- Lutt, M.¹ Schlomka, J.P.² Tolan, M.³ Stettner, J.⁴ Seeck, O.H.⁵ Press, W.⁶

14
- 33744991462
- (1988) Phys. Rev. B , vol.38 , pp. 2297
- Sinha, S.K.¹ Sirota, E.B.² Garoff, S.³ Stanley, H.B.⁴

15
- 4243413468
- (1993) Phys. Rev. Lett. , vol.70 , pp. 2900
- You, H.¹ Chiarello, R.P.² Kim, H.K.³ Vandervoort, K.G.⁴

16
- 0032497771
- (1998) Surf. Sci. , vol.417
- Oliva, A.I.¹ Sacedon, J.L.² Anguiano, E.³ Aguilar, M.⁴ Aznarez, J.A.⁵ Mendez, J.A.⁶

17
- 36849136455
- (1950) J. Appl. Phys. , vol.21 , pp. 301
- Herring, C.¹

18
- 4243979739
- (1986) Phys. Rev. Lett. , vol.56 , pp. 889
- Kardar, M.¹ Parisi, G.² Zhang, Y.C.³

19
- 0003805739
- Cambridge University Press, Cambridge
- (1998) Fractals, Scaling and Growth Far From Equilibrium
- Meakin, P.¹

20
- 0027715415
- (1993) J. Microsc. , vol.172 , pp. 233
- Aguilar, M.¹ Anguiano, E.² Pancorbo, M.³

21
- 0000963652
- (1997) J. Appl. Phys. , vol.82 , pp. 5891
- Fang, S.J.¹ Haplepete, S.² Chen, W.³ Helms, C.R.⁴ Edwards, H.⁵

22
- 0030263102
- (1996) J. Electrochem. Soc. , vol.143 , pp. 3122
- Schmidt, W.U.¹ Alkire, R.C.² Gewirth, A.A.³

23
- 0000279072
- (1997) Phys. Rev. B , vol.56 , pp. 4243
- Tanenbaum, D.M.¹ Laracuente, A.L.² Gallagher, A.³

24
- 0032067892
- (1998) J. Non-Cryst. Solids , vol.227-230 , pp. 890
- Kondo, M.¹ Ohe, T.² Saito, K.³ Nishimiya, T.⁴ Matsuda, A.⁵

25
- 4244076431
- (1996) Phys. Rev. Lett. , vol.76 , pp. 3774
- Yang, H.-N.¹ Zhao, Y.-P.² Wang, G.-C.³ Lu, T.-M.⁴

26
- 0032606529
- (1999) J. Appl. Phys. , vol.85 , pp. 8032
- Flewitt, A.J.¹ Robertson, J.² Milne, W.I.³

27
- 33744601089
- to be published
- Surf. Sci.
- Gupta, A.¹ Yang, H.² Parsons, G.N.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.