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Volumn 248, Issue 4-6, 2005, Pages 459-467

Comparison of effective medium approximation and Rayleigh-Rice theory concerning ellipsometric characterization of rough surfaces

(2) Franta, Daniel a Ohlídal, Ivan a

a MASARYK UNIVERSITY (Czech Republic)

Author keywords

Ellipsometry; EMA; Roughness; RRT

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; DATA REDUCTION; ELLIPSOMETRY; FREQUENCIES; LIGHT SCATTERING; PARAMETER ESTIMATION; THICKNESS MEASUREMENT;

EFFECTIVE MEDIUM APPROXIMATION (EMA); POWER DENSITY (PD); RAYLEIGH-RICE THEORY (RRT); THICKNESS VALUE;

SURFACE ROUGHNESS;

EID: 16244380499 PISSN: 00304018 EISSN: None Source Type: Journal
DOI: 10.1016/j.optcom.2004.12.016 Document Type: Article

Times cited : (83)

References (32)

1
- 35949035159
- D.E. Aspnes, J.B. Theeten, and F. Hottier Phys. Rev. B 20 1979 3292
- (1979) Phys. Rev. B , vol.20 , pp. 3292
- Aspnes, D.E.¹ Theeten, J.B.² Hottier, F.³

2
- 0023535242
- Y. Gaillyová Thin Solid Films 155 1987 217
- (1987) Thin Solid Films , vol.155 , pp. 217
- Gaillyová, Y.¹

3
- 84975635761
- J.R. Blanco, and P.J. McMarr Appl. Opt. 30 1991 3210
- (1991) Appl. Opt. , vol.30 , pp. 3210
- Blanco, J.R.¹ McMarr, P.J.²

4
- 0000144159
- S. Guo, H. Arwin, S.N. Jacobsen, K. Järrendahl, and H. Helmersson J. Appl. Phys. 77 1995 5369
- (1995) J. Appl. Phys. , vol.77 , pp. 5369
- Guo, S.¹ Arwin, H.² Jacobsen, S.N.³ Järrendahl, K.⁴ Helmersson, H.⁵

5
- 0031998606
- H. Yao, J.C. Erickson, L.A. Lim, and R.B. James Thin Solid Films 313-314 1998 351
- (1998) Thin Solid Films , vol.313-314 , pp. 351
- Yao, H.¹ Erickson, J.C.² Lim, L.A.³ James, R.B.⁴

6
- 0032473236
- P. Petrik, L.P. Biró, M. Fried, T. Lohner, R. Berger, C. Schneider, J. Gyulai, and H. Ryssel Thin Solid Films 315 1998 186
- (1998) Thin Solid Films , vol.315 , pp. 186
- Petrik, P.¹ Biró, L.P.² Fried, M.³ Lohner, T.⁴ Berger, R.⁵ Schneider, C.⁶ Gyulai, J.⁷ Ryssel, H.⁸

7
- 0000752509
- K. Postava, H. Sueki, M. Aoyama, T. Yamaguchi, Ch. Ino, and Y. Igasaki J. Appl. Phys. 87 2000 7820
- (2000) J. Appl. Phys. , vol.87 , pp. 7820
- Postava, K.¹ Sueki, H.² Aoyama, M.³ Yamaguchi, T.⁴ Ino, Ch.⁵ Igasaki, Y.⁶

8
- 0033899069
- B. Gruska Thin Solid Films 364 2000 138
- (2000) Thin Solid Films , vol.364 , pp. 138
- Gruska, B.¹

9
- 0001642363
- H. Fujiwara, J. Koh, P.I. Rovira, and R.W. Collins Phys. Rev. B 61 2000 10832
- (2000) Phys. Rev. B , vol.61 , pp. 10832
- Fujiwara, H.¹ Koh, J.² Rovira, P.I.³ Collins, R.W.⁴

10
- 0035500080
- S. Gupta, B.R. Weiner, and G. Morell Diamond Relat. Mater. 10 2001 1968
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1968
- Gupta, S.¹ Weiner, B.R.² Morell, G.³

11
- 1842765626
- M. Pandey, D. Bhatacharyya, D.S. Patil, K. Ramachandran, and N. Venkatramani Surf. Coat. Technol. 182 2004 24
- (2004) Surf. Coat. Technol. , vol.182 , pp. 24
- Pandey, M.¹ Bhatacharyya, D.² Patil, D.S.³ Ramachandran, K.⁴ Venkatramani, N.⁵

12
- 84980088843
- S.O. Rice Commun. Pure. Appl. Math. 4 1951 351
- (1951) Commun. Pure. Appl. Math. , vol.4 , pp. 351
- Rice, S.O.¹

13
- 84935408718
- G.R. Valenzuela IEEE Trans. Antennas Propag. 15 1967 552
- (1967) IEEE Trans. Antennas Propag. , vol.15 , pp. 552
- Valenzuela, G.R.¹

14
- 0014818221
- K. Krishen IEEE Trans. Antennas Propag. 18 1970 573
- (1970) IEEE Trans. Antennas Propag. , vol.18 , pp. 573
- Krishen, K.¹

15
- 84975571176
- R. Schiffer Appl. Opt. 26 1987 704
- (1987) Appl. Opt. , vol.26 , pp. 704
- Schiffer, R.¹

16
- 0009758526
- J.I. Larruquert, J.A. Méndez, and J.A. Aznárez Appl. Opt. 34 1995 4892
- (1995) Appl. Opt. , vol.34 , pp. 4892
- Larruquert, J.I.¹ Méndez, J.A.² Aznárez, J.A.³

17
- 11744257049
- D. Franta, and I. Ohlídal J. Mod. Opt. 45 1998 903
- (1998) J. Mod. Opt. , vol.45 , pp. 903
- Franta, D.¹ Ohlídal, I.²

18
- 0038695308
- E. Wolf North-Holland Amsterdam
- I. Ohlídal, and D. Franta E. Wolf Progress in Optics vol. 41 2000 North-Holland Amsterdam 181 282
- (2000) Progress in Optics , vol.41 , pp. 181-282
- Ohlídal, I.¹ Franta, D.²

19
- 0034393535
- I. Ohlídal, and D. Franta Acta Phys. Slov. 50 2000 489
- (2000) Acta Phys. Slov. , vol.50 , pp. 489
- Ohlídal, I.¹ Franta, D.²

20
- 4244178073
- I. Ohlídal, D. Franta, J. Hora, K. Navrátil, J. Weber, and P. Janda Mikrochim. Acta [Suppl.] 15 1998 177
- (1998) Mikrochim. Acta [Suppl.] , vol.15 , pp. 177
- Ohlídal, I.¹ Franta, D.² Hora, J.³ Navrátil, K.⁴ Weber, J.⁵ Janda, P.⁶

21
- 0032221180
- D. Franta, I. Ohlídal, and D. Munzar Acta Phys. Slov. 48 1998 451
- (1998) Acta Phys. Slov. , vol.48 , pp. 451
- Franta, D.¹ Ohlídal, I.² Munzar, D.³

22
- 0032221171
- I. Ohlídal, and D. Franta Acta Phys. Slov. 48 1998 459
- (1998) Acta Phys. Slov. , vol.48 , pp. 459
- Ohlídal, I.¹ Franta, D.²

23
- 0041138738
- D. Franta, I. Ohlídal, D. Munzar, J. Hora, K. Navrátil, C. Manfredotti, F. Fizzotti, and E. Vittone Thin Solid Films 343-344 1999 295
- (1999) Thin Solid Films , vol.343-344 , pp. 295
- Franta, D.¹ Ohlídal, I.² Munzar, D.³ Hora, J.⁴ Navrátil, K.⁵ Manfredotti, C.⁶ Fizzotti, F.⁷ Vittone, E.⁸

24
- 0001275768
- D. Franta, I. Ohlídal, and P. Klapetek Mikrochim. Acta 132 2000 443
- (2000) Mikrochim. Acta , vol.132 , pp. 443
- Franta, D.¹ Ohlídal, I.² Klapetek, P.³

25
- 0036693809
- D. Franta, I. Ohlídal, P. Klapetek, and P. Pokorný Surf. Interface Anal. 34 2002 759
- (2002) Surf. Interface Anal. , vol.34 , pp. 759
- Franta, D.¹ Ohlídal, I.² Klapetek, P.³ Pokorný, P.⁴

26
- 0037103444
- D. Franta, I. Ohlídal, P. Klapetek, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter J. Appl. Phys. 92 2002 1873
- (2002) J. Appl. Phys. , vol.92 , pp. 1873
- Franta, D.¹ Ohlídal, I.² Klapetek, P.³ Montaigne-Ramil, A.⁴ Bonanni, A.⁵ Stifter, D.⁶ Sitter, H.⁷

27
- 2142641654
- D. Franta, I. Ohlídal, P. Klapetek, and P. Roca i Cabarrocas Thin Solid Films 455-456 2004 399
- (2004) Thin Solid Films , vol.455-456 , pp. 399
- Franta, D.¹ Ohlídal, I.² Klapetek, P.³ Roca Cabarrocas, I.P.⁴

28
- 4444357027
- D. Franta, I. Ohlídal, P. Klapetek, and M. Ohlídal Surf. Interface Anal. 36 2004 1203
- (2004) Surf. Interface Anal. , vol.36 , pp. 1203
- Franta, D.¹ Ohlídal, I.² Klapetek, P.³ Ohlídal, M.⁴

29
- 4644273886
- D. Franta, I. Ohlídal, P. Klapetek, A. Montaigne-Ramil, A. Bonanni, D. Stifter, and H. Sitter Thin Solid Films 468 2004 193
- (2004) Thin Solid Films , vol.468 , pp. 193
- Franta, D.¹ Ohlídal, I.² Klapetek, P.³ Montaigne-Ramil, A.⁴ Bonanni, A.⁵ Stifter, D.⁶ Sitter, H.⁷

30
- 0040195719
- D. Franta, and I. Ohlídal Acta Phys. Slov. 50 2000 411
- (2000) Acta Phys. Slov. , vol.50 , pp. 411
- Franta, D.¹ Ohlídal, I.²

31
- 0037212022
- P. Klapetek, and I. Ohlídal Ultramicroscopy 94 2003 19
- (2003) Ultramicroscopy , vol.94 , pp. 19
- Klapetek, P.¹ Ohlídal, I.²

32
- 0347227351
- I. Ohlídal, and F. Lukeš Opt. Acta 19 1972 817
- (1972) Opt. Acta , vol.19 , pp. 817
- Ohlídal, I.¹ Lukeš, F.²

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