Suppressed surface morphology instabilities in amorphous hydrogenated silicon deposition

Applied Physics Letters

Volumn 85, Issue 16, 2004, Pages 3462-3464

  Dalakos, George T ^a   Plawsky, Joel L ^b   Persans, Peter D ^b  

^a GE GLOBAL RESEARCH   (United States)

^b RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS HYDROGENATED SILICON DEPOSITION; HELIUM ION BOMBARDMENT; HOPPING RATE; HYDROGEN-PASSIVATED SURFACE;

COMPUTER SIMULATION; DATA ACQUISITION; HELIUM; HYDROGENATION; MONTE CARLO METHODS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; THIN FILMS;

AMORPHOUS SILICON;

EID: 9744282638     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1808495     Document Type: Article

References (18)

1. D. G. Cahill, J. Vac. Sci. Technol. A 21, S110 (2003).
2. F. Family and T. Viscek, J. Phys. A 18, 75 (1985).
3. A. L. Barabasi and H. E. Stanley, Fractal Concepts of Surface Growth (Cambridge University Press, Cambridge, 1995).
4. W. M. Tong and R. S. Williams, Annu. Rev. Phys. Chem. 45, 401 (1994).
5. R. S. Street, Hydrogenated Amorphous Silicon (Cambridge University Press, Cambridge, 1991).
6. A. H. M. Smets, W. M. M. Kessels, and M. C. M. van de Sanden, Appl. Phys. Lett. 82, 865 (2003).
7. K. R. Bray and G. N. Parsons, Phys. Rev. B 65, 035311 (2002).
8. W. M. M. Kessels, D. C. Marra, M. C. M. van de Sanden, and E. S. Aydil, J. Vac. Sci. Technol. A 20, 781 (2002).
9. J. Perrin, in Plasma Deposition of Amorphous Silicon-based Materials, edited by G. Bruno, P. Capezzuto, and A. Madan (Academic, London, 1995), Chap. 4.
10. G. T. Dalakos, J. L. Plawsky, and P. D. Persans, Ph.D. thesis, Rensselaer Polytechnic Institute, 2004 (unpublished).
11. G. T. Dalakos, J. L. Plawsky, and P. D. Persans (unpublished).
12. R. Dewarrat and J. Robertson, Appl. Phys. Lett. 82, 883 (2003).
13. J. Robertson, Mater. Res. Soc. Symp. Proc. 609, A.1.4.1. (2000).
14. J. F. Ziegler and J. P. Biersack (SRIM calculation), www.srim.org.
15. G. T. Dalakos, J. L. Plawsky, and P. D. Persans, J. Non-Cryst. Solids (submitted).
16. W. W. Mullins, J. Appl. Phys. 30, 77 (1959).
17. J. H. Yao and Guo, Phys. Rev. E 47, 1007 (1993).
18. S. Ramalingam, S. Sriraman, E. S. Aydil, and D. Maroudas, Appl. Phys. Lett. 78, 2685 (2001).