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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 4, 2003, Pages 1545-1549

In situ studies of the amorphous to microcrystalline transition of hot-wire chemical vapor deposition Si:H films using real-time spectroscopic ellipsometry

(4) Levi, D H a Nelson, B P a Perkins, J D a Moutinho, H R a

a NATIONAL RENEWABLE ENERGY LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTAL STRUCTURE; CRYSTALLINE MATERIALS; ELLIPSOMETRY; MORPHOLOGY; PHASE TRANSITIONS; RAMAN SCATTERING; SILICON; SURFACE ROUGHNESS;

AMORPHOUS TO MICROCRYSTALLINE TRANSITION; CRYSTALLINITY; HOT WIRE CHEMICAL VAPOR DEPOSITION; REAL TIME SPECTROSCOPIC ELLIPSOMETRY;

THIN FILMS;

EID: 0043031301 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1564037 Document Type: Article

Times cited : (7)

References (9)

1
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- Proceedings of the First International Conference on Cat-CVD (Hot-Wire CVD) Process, edited by J. P. Conde, H. Masumura, and A. H. Mahan (Elsevier Science, B. B. The Netherlands, 2001) (Thin Solid Films Vol. 395).
- (2001) Proceedings of the First International Conference on Cat-CVD (Hot-Wire CVD) Process , vol.395

2
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- R. W. Collins, J. Koh, H. Fujiwara, P. I. Rovira, A. S. Ferlauto, J. A. Zapien, C. R. Wronski, and R. Messier, Appl. Surf. Sci. 154-155, 217 (2000).
- (2000) Appl. Surf. Sci. , vol.154-155 , pp. 217
- Collins, R.W.¹ Koh, J.² Fujiwara, H.³ Rovira, P.I.⁴ Ferlauto, A.S.⁵ Zapien, J.A.⁶ Wronski, C.R.⁷ Messier, R.⁸

3
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- A.S. Ferlauto, R.J. Koval, C.R. Wronski and R.W. Collins, Mater. Res. Soc. Symp. Proc. 664, A5.4 (2002).
- (2002) Mater. Res. Soc. Symp. Proc. , vol.664
- Ferlauto, A.S.¹ Koval, R.J.² Wronski, C.R.³ Collins, R.W.⁴

4
- 0036920092
- San Francisco, CA; (unpublished)
- B.P. Nelson and D.H. Levi, MRS Symposium Proceedings, Vol. 715, San Francisco, CA,2002 (unpublished), p. 159.
- MRS Symposium Proceedings, Vol. 715, San Francisco, CA, 2002 , pp. 159
- Nelson, B.P.¹ Levi, D.H.²

5
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- San Francisco, CA; (unpublished)
- D.H. Levi, B.P. Nelson, and J.D. Perkins, MRS Symposium Proceedings, Vol. 715, San Francisco, CA 2002, (unpublished), p. 153.
- MRS Symposium Proceedings, Vol. 715, San Francisco, CA, 2002 , pp. 153
- Levi, D.H.¹ Nelson, B.P.² Perkins, J.D.³

6
- 0041893662
- (to be published)
- D.H. Levi, B.P. Nelson, J.D. Perkins, and H.R. Moutinho, Proceedings of the 29th IEEE Photovoltaic Specialists Conference, New Orleans, LA, 2002 (to be published).
- Proceedings of the 29th IEEE Photovoltaic Specialists Conference, New Orleans, LA, 2002
- Levi, D.H.¹ Nelson, B.P.² Perkins, J.D.³ Moutinho, H.R.⁴

7
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- D.E. Aspnes, Thin Solid Films 89, 249 (1982).
- (1982) Thin Solid Films , vol.89 , pp. 249
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8
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- edited by R. D. McConnell and V. K. Kapur (Electrochemical Society, New York)
- A.S. Ferlauto, G.M. Ferrerira, C. Chen, P.I. Rovira, C.R. Wronski, R.W. Collins, X. Deng, and G. Ganguly, Photovoltaics for the 21st Century II, edited by R. D. McConnell and V. K. Kapur (Electrochemical Society, New York, 2001), 2001, pp. 199-228.
- (2001) Photovoltaics for the 21st Century II , pp. 199-228
- Ferlauto, A.S.¹ Ferrerira, G.M.² Chen, C.³ Rovira, P.I.⁴ Wronski, C.R.⁵ Collins, R.W.⁶ Deng, X.⁷ Ganguly, G.⁸

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- G. Yue, J.D. Lorentzen, J. Lin, Q. Wang, and D. Han, Appl. Phys. Lett. 75, 492 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 492
- Yue, G.¹ Lorentzen, J.D.² Lin, J.³ Wang, Q.⁴ Han, D.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.