메뉴 건너뛰기




Volumn 100, Issue 5, 2006, Pages

Roughness evolution during a-C:H film growth in methane plasmas

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELLIPSOMETRY; FILM GROWTH; HYDROGENATION; INDUCTIVELY COUPLED PLASMA; SURFACE ROUGHNESS;

EID: 33748847697     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2266156     Document Type: Article
Times cited : (19)

References (20)
  • 15
    • 33748860769 scopus 로고    scopus 로고
    • PhD thesis, University of Sevilla
    • A. Yanguas-Gil, PhD thesis, University of Sevilla (2006).
    • (2006)
    • Yanguas-Gil, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.