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Volumn 100, Issue 5, 2006, Pages
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Roughness evolution during a-C:H film growth in methane plasmas
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ELLIPSOMETRY;
FILM GROWTH;
HYDROGENATION;
INDUCTIVELY COUPLED PLASMA;
SURFACE ROUGHNESS;
HYDROGENATED CARBON FILMS;
PLASMA DEPOSITION;
ROUGHNESS DEVELOPMENT;
SPECTROSCOPIC ELLIPSOMETRY;
THIN FILMS;
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EID: 33748847697
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2266156 Document Type: Article |
Times cited : (19)
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References (20)
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