Effects of negative bias on the structural, topological and tribological properties of amorphous carbon films prepared by magnetron sputtering

Surface and Interface Analysis

Volumn 43, Issue 9, 2011, Pages 1218-1223

  Wang, Zhou ^a   Wang, Chengbing ^b   Zhang, Bin ^a   Wang, Qi ^c   Zhang, Junyan ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b LANZHOU JIAOTONG UNIVERSITY   (China)

^c LANZHOU UNIVERSITY   (China)

Author keywords

amorphous carbon films; magnetron sputtering; tribological

Indexed keywords

AS-DEPOSITED FILMS; COEFFICIENT OF FRICTIONS; GRAPHITE-LIKE STRUCTURES; GRAPHITIC DOMAINS; INTERFACIAL SHEAR; MAGNETRON SPUTTERING SYSTEMS; NEGATIVE BIAS; NEGATIVE SUBSTRATES; ORDERING STRUCTURE; ORDERS OF MAGNITUDE; STRUCTURAL EVOLUTION; TRIBOLOGICAL; TRIBOLOGICAL PROPERTIES; TRIBOTESTING; WEAR RATES;

AMORPHOUS CARBON; AMORPHOUS FILMS; FILM PREPARATION; FRICTION; MAGNETRON SPUTTERING; SURFACE ROUGHNESS; TRIBOLOGY;

CARBON FILMS;

EID: 80051644176     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3702     Document Type: Article

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