Optical and morphological properties of porous diamond-like-carbon films deposited by magnetron sputtering

Journal of Non-Crystalline Solids

Volumn 352, Issue 32-35, 2006, Pages 3734-3738

  Baroni, M P M A ^a   Ventura Conceicao M ^b   Rosa, R R ^a   Persson, C ^c   Arwin, H ^d   da Silva Jr , E F ^e   Roman, L S ^f   Nakamura, O ^b   Pepe, I ^b   Ferreira da Silva, A ^b  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

^b Instituto de Fisica   (Brazil)

^c ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^d LINKÖPING UNIVERSITY   (Sweden)

^e FEDERAL UNIVERSITY OF PERNAMBUCO   (Brazil)

^f FEDERAL UNIVERSITY OF PARANÁ   (Brazil)

Author keywords

Modeling and simulation; Optical properties; Thermal properties

Indexed keywords

CARBON; DIAMONDS; ELLIPSOMETRY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; PHOTOLUMINESCENCE; POROUS SILICON; THERMODYNAMIC PROPERTIES;

DENSITY APPROXIMATION; POROUS DIAMOND LIKE CARBON (PDLC); SFM POROSITY;

THIN FILMS;

EID: 33748052982     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.02.126     Document Type: Article

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