Surface roughness, mechanical properties and bonding structure of silicon carbon nitride films grown by dual ion beam sputtering

Journal of Alloys and Compounds

Volumn 492, Issue 1-2, 2010, Pages 269-276

  Zhou, Fei ^a   Yue, Bin ^a   Wang, Xiaolei ^a   Wu, Xuemei ^b   Zhuge, Lanjian ^b  

^a NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS   (China)

^b SOOCHOW UNIVERSITY   (China)

Author keywords

Bonding structure; Hardness; Roughness; Silicon carbon nitride film

Indexed keywords

BONDING STRUCTURE; DOUBLE BONDS; DUAL ION BEAM SPUTTERING; FILM SURFACES; ION BEAM ENERGY; MINIMUM VALUE; NANOINDENTERS; NITROGEN ION BEAM; NON-CONTACT; PEAK VALUES; SI-C-N FILMS; SILICON CARBON NITRIDE;

BEAM PLASMA INTERACTIONS; CARBON FILMS; CARBON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; ION BEAMS; ION BOMBARDMENT; IONS; MECHANICAL PROPERTIES; METAL ANALYSIS; RAMAN SPECTROSCOPY; SILICON CARBIDE; SPUTTERING; STRUCTURAL PROPERTIES; SURFACE PROPERTIES; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

SILICON;

EID: 76549106781     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.11.063     Document Type: Article

References (33)

1. Lo H.C., Wu J.J., Wen C.Y., Wong T.S., Lin S.T., Chen K.H., and Chen L.C. Diamond Relat. Mater. 10 (2001) 1916-1920
2. Gao P., Xu J., Piao Y., Ding W., Wang D., Deng X., and Dong C. Surf. Coat. Technol. 201 (2007) 5298-5301
3. Ma S.L., Xu B., Wu G.Z., Wang Y.F., Ma F., Ma D.Y., Xu K.W., and Bell T. Surf. Coat. Technol. 202 (2008) 5379-5382
4. Hoche H., Allebrandt D., Bruns M., Riedel R., and Fasel C. Surf. Coat. Technol. 202 (2008) 5567-5571
5. Zhou F., Yuan Y.G., Chen K.M., and Wang X.L. Nuclear Inst. Methods Phys. Res. B 267 (2009) 2858-2865
6. Zhou F., Yuan Y.G., Wang X.L., and Wang M.L. Appl. Surf. Sci. 255 9 (2009) 5079-5087
7. Nakayamada T., Matsuo K., Hayashi Y., Izumi A., and Kadotani Y. Thin Solid Films 516 (2008) 656-658
8. Pech D., Schupp N., Steyer P., Hack T., Gachon Y., Héau C., Loir A.S., and Sánchez-López J.C. Wear 266 (2009) 832-838
9. Du X.W., Fu Y., Sun J., Yao P., and Cui L. Mater. Chem. Phys. 103 (2007) 456-460
10. Kobayashi K., Yokoyama H., and Endoh M. Appl. Surf. Sci. 254 (2008) 6222-6225
11. Chen L.C., Wu C.T., Wu J.J., and Chen K.H. Int. J. Mod. Phys. B 14 (2000) 333-348
12. Chen C.W., Huang C.C., Lin Y.Y., Chen L.C., and Chen K.H. Diamond Relat. Mater. 14 (2005) 1126-1130
13. Swain B.P., and Hwang N.M. Appl. Surf. Sci. 254 (2008) 5319-5322
14. Limmanee A., Otsubo M., Sugiura T., Sato T., Miyajima S., Yamada A., and Konagai M. Thin Solid Films 516 (2008) 652-655
15. Jedrzejowski P., Cizek J., Amassian A., Klemberg-Sapieha J.E., Vlcek J., and Martinu L. Thin Solid Films 447/448 (2004) 201-207
16. Kouakou P., Belmahi M., Brien V., Hody V., Migeon H., and Bougdira J. Surf. Coat. Technol. 203 (2008) 277-283
17. Awad Y., El Khakani M.A., Aktik C., Mouine J., Camire N., Lessard M., Scarlete M., Al-Abadleh H.A., and Smirani R. Surf. Coat. Technol. 204 (2009) 539-545
18. Wu J.J., Wu C.T., Liao Y.C., Lu T.R., Chen L.C., Chen K.H., Hwa L.G., Kuo C.T., and Ling K.J. Thin Solid Films 355-356 (1999) 417-422
19. Li W.L., Yang J.L., Zhao Y., and Fei W.D. J. Alloys Compd. 482 (2009) 317-319
20. Vlček J., Kormunda M., Čĺzek J., Soukup Z., Peřina V., and Zemek J. Diamond Relat. Mater. 12 (2003) 1287-1294
21. Bhattacharyya A.S., Mishra S.K., Mukherjee S., and Das G.C. J. Alloys Compd. 478 1-2 (2009) 474-478
22. Chen Z., Lin H., Zhou J., Ma Z., and Xie E. J. Alloys Compd. 487 1-2 (2009) 531-536
23. Gago R., Jiménez I., and Albella J.M. Thin Solid Film 373 (2000) 277-281
24. Alizadeh Z., Sundaram K.B., and Seal S. Appl. Surf. Sci. 183 (2001) 270-277
25. Sundaram K.B., and Alizdeh J. Thin Solid Films 370 (2000) 151-154
26. Wu X.C., Cai R.Q., Yan P.X., Liu W.M., and Tian J. Appl. Surf. Sci. 185 (2002) 262-266
27. Xie E., Ma Z., Lin H., Zhang Z., and He D. Opt. Mater. 23 (2003) 151-156
28. Wixom M.R. J. Am. Ceram. Soc. 73 (1990) 1973-1978
29. Ferrari A.C., Rodil S.E., and Robertson J. Phys. Rev. B 67 (2003) pp. 155306-1-1155306-20
30. Cheng Y.H., Tay B.K., Lau S.P., Shi X., Qiao X.L., Chen J.G., Wu Y.P., and Xie C.S. Appl. Phys. A73 (2001) 341-345
31. Bendeddouche A., Berjoan R., Bêche E., and Hillel R. Surf. Coat. Technol. 111 (1999) 184-190
32. Liang E.J., Zhang J.W., Leme J., Moura C., and Cunha L. Thin Solid Films 469-470 (2004) 410-415
33. Zhou F., Adachi K., and Kato K. Thin Solid Films 514 (2006) 231-239