SCOPUS 정보 검색 플랫폼

Volumn 41, Issue 7, 2009, Pages 560-564

Effects of sputtering current on the bonding structure and mechanical properties of diamond-like carbon films deposited by MFPUMST

(4) Dai, H Y a Jiang, H a Zhan, C Y a Huang, N K a

a SICHUAN UNIVERSITY (China)

Author keywords

DLC films; Mechanical properties; Sp3 fraction; Sputtering current

Indexed keywords

BONDING CONFIGURATIONS; BONDING STRUCTURE; CHEMICAL BONDINGS; DLC FILM; DLC FILMS; ELASTIC RECOVERY; GLASS WAFER; NANOINDENTATION TECHNIQUES; SP3 FRACTION; SPUTTERING CURRENT; SPUTTERING CURRENTS; UNBALANCED MAGNETRON SPUTTERING;

CHEMICAL BONDS; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; DIAMONDS; FILM PREPARATION; HARDNESS; MECHANICAL PROPERTIES; RAMAN SPECTROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 67650824957 PISSN: 01422421 EISSN: 10969918 Source Type: Journal
DOI: 10.1002/sia.3060 Document Type: Article

Times cited : (14)

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