X-ray photoelectron analysis of surface functional groups on diamond-like carbon films by gas-phase chemical derivatization method

Surface and Interface Analysis

Volumn 42, Issue 2, 2010, Pages 77-87

  Takabayashi, S ^a   Okamoto, Keishi ^a,b   Motoyama, Hiroaki ^a   Nakatani, Tatsuyuki ^b   Sakaue, Hiroyuki ^a   Takahagi, Takayuki ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

^b Toyo Advanced Technologies Co Ltd   (Japan)

Author keywords

Diamond like carbon (DLC); Gas phase chemical derivatization (GCD); X ray photoelectron spectroscopy (XPS)

Indexed keywords

[CARBONYL; CARBON-CARBON BOND; CHEMICAL DERIVATIZATION; COOH GROUP; DERIVATIZATION REACTION; DIAMOND-LIKE CARBON; DLC FILM; GASPHASE; HIGH ACTIVATION ENERGY; OXIDIZED FILMS; SIDE REACTIONS; SURFACE FUNCTIONAL GROUPS; TARGET GROUP; X-RAY PHOTOELECTRONS;

ACTIVATION ENERGY; CARBON FILMS; CHEMICAL ANALYSIS; DIAMOND LIKE CARBON FILMS; DIAMONDS; ELECTRONS; FLUORINE; FUNCTIONAL GROUPS; GAS PERMEABLE MEMBRANES; OXYGEN; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; SPECTRUM ANALYSIS; X RAY ANALYSIS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 76749137224     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.3156     Document Type: Article

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