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Volumn 16, Issue 4-7 SPEC. ISS., 2007, Pages 1286-1290

Diamond like carbon films deposited from graphite target by asymmetric bipolar pulsed-DC magnetron sputtering

Author keywords

Diamond like carbon; Pulsed DC power; Sputtering; Substrate bias voltage

Indexed keywords

CONTACT ANGLE; GRAPHITE; ION BOMBARDMENT; MAGNETRON SPUTTERING; PLASMAS; PRESSURE EFFECTS;

DAVIS MODEL; PULSED-DC POWER; SUBSTRATE BIAS VOLTAGE;

DIAMOND LIKE CARBON FILMS;

EID: 34047252524 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2006.12.054 Document Type: Article

Times cited : (30)

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