메뉴 건너뛰기




Volumn 103, Issue 12, 2008, Pages

Comparative study of hydrogenated diamondlike carbon film and hard hydrogenated graphitelike carbon film

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CARBON FILMS; FRICTION; HYDROGEN; HYDROGENATION; LITHOGRAPHY; MECHANICAL PROPERTIES; STRUCTURAL PROPERTIES; THREE DIMENSIONAL;

EID: 46449093029     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2938747     Document Type: Article
Times cited : (30)

References (27)
  • 1
    • 0026816817 scopus 로고
    • 0257-8972 10.1016/0257-8972(92)90001-Q.
    • J. Robertson, Surf. Coat. Technol. 0257-8972 10.1016/0257-8972(92)90001-Q 50, 185 (1992).
    • (1992) Surf. Coat. Technol. , vol.50 , pp. 185
    • Robertson, J.1
  • 11
    • 0242603790 scopus 로고    scopus 로고
    • 0163-1829 10.1103/PhysRevB.61.14095.
    • A. C. Ferrari and J. Robertson, Phys. Rev. B 0163-1829 10.1103/PhysRevB.61.14095 61, 14095 (2000).
    • (2000) Phys. Rev. B , vol.61 , pp. 14095
    • Ferrari, A.C.1    Robertson, J.2
  • 14
    • 0028513408 scopus 로고
    • 0021-8979 10.1063/1.357385.
    • M. A. Tamor and W. C. Vassel, J. Appl. Phys. 0021-8979 10.1063/1.357385 76, 3823 (1994).
    • (1994) J. Appl. Phys. , vol.76 , pp. 3823
    • Tamor, M.A.1    Vassel, W.C.2
  • 17
    • 4243597147 scopus 로고
    • 0163-1829 10.1103/PhysRevB.41.3738.
    • R. Shroder, R. Nemanich, and J. Glass, Phys. Rev. B 0163-1829 10.1103/PhysRevB.41.3738 41, 3738 (1990).
    • (1990) Phys. Rev. B , vol.41 , pp. 3738
    • Shroder, R.1    Nemanich, R.2    Glass, J.3
  • 23
    • 0000595958 scopus 로고    scopus 로고
    • 0003-6951 10.1063/1.116418.
    • W. Jacob and M. Unger, Appl. Phys. Lett. 0003-6951 10.1063/1.116418 68, 475 (1996).
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 475
    • Jacob, W.1    Unger, M.2
  • 25
    • 0037165927 scopus 로고    scopus 로고
    • 0927-796X 10.1016/S0927-796X(02)00005-0.
    • J. Robertson, Mater. Sci. Eng., R. 0927-796X 10.1016/S0927-796X(02)00005- 0 37, 129 (2002).
    • (2002) Mater. Sci. Eng., R. , vol.37 , pp. 129
    • Robertson, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.