Structural characterization of sputtered hydrogenated amorphous carbon films by solid state nuclear magnetic resonance

Journal of Applied Physics

Volumn 104, Issue 1, 2008, Pages

  Cho, Gyunggoo ^a,b   Yen, Bing K ^a,d   Klug, Christopher A ^c,e  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b Korea Basic Science Institute (KBSI)   (South Korea)

^c Stanford University   (United States)

^d Hoya Corporation USA   (United States)

^e NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ATOMS; CARBON; CARBON FILMS; HYDROGENATION; HYDROGENOLYSIS; MAGNETIC FIELDS; MAGNETIC RESONANCE; NUCLEAR MAGNETIC RESONANCE; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; RESONANCE;

A-C:H FILMS; CARBON-13; H-CONTENT; HYDROGENATED AMORPHOUS CARBON (A C:H); HYDROGENATED AMORPHOUS CARBON FILMS; NM R SPECTRUM; SOLID STATE NUCLEAR MAGNETIC RESONANCE (NMR); STRUCTURAL CHARACTERIZATIONS;

AMORPHOUS CARBON;

EID: 47749144367     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2952515     Document Type: Article

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