Mechanical and tribological aspects on a-C films deposited by lamp assisted chemical vapour deposition

Surface and Coatings Technology

Volumn 138, Issue 2-3, 2001, Pages 264-268

  Lindstam, M ^a   Wanstrand O ^a   Boman, M ^a   Piglmayer, K ^b  

^a UPPSALA UNIVERSITY   (Sweden)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Carbon; Elastic properties; Lamp chemical vapour deposition; Nanoindention; Nanostructure; Roughness

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; FRICTION; INDENTATION; NANOSTRUCTURED MATERIALS; PHOTOLYSIS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

HYDROGEN LAMPS;

AMORPHOUS FILMS;

COATING; CUTTING TOOL; FILM; TOOL; TOOL WEAR; TRIBOLOGICAL DESIGN; TRIBOLOGY; VAPOR DEPOSITION;

EID: 0035897273     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)01157-9     Document Type: Article

References (12)