Tribological properties of amorphous carbon thin films grown by magnetron sputtering method

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 218-221

  Park, Yong Seob ^a   Myung, Hyun Sik ^a   Han, Jeon Geon ^a   Hong, Byungyou ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Amorphous carbon; Magnetron sputtering; Tribological properties

Indexed keywords

ATOMIC FORCE MICROSCOPY; DEPOSITION; FRICTION; HARDNESS; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SILICON; THIN FILMS; TRIBOLOGY;

DEPOSITION RATE; FRICTION COEFFICIENTS;

CARBON;

CARBON; COATING; FRICTION; HARDNESS; SPUTTERING; TRIBOLOGY;

EID: 16744366023     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.043     Document Type: Article

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