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Volumn 19, Issue 7-9, 2010, Pages 866-869
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Properties and tool performance of ta-C films deposited by double-bend filtered cathodic vacuum arc for micro drilling applications
a
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Author keywords
Double bend filtered cathodic vacuum arc; Micro drilling; Microhardness; Tetrahedral amorphous carbon (ta C); Tool wear
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Indexed keywords
ARGON GAS;
CO-SUBSTRATE;
FILTERED CATHODIC VACUUM ARC;
FRICTION COEFFICIENTS;
HIGH-SPEED;
MACHINING PERFORMANCE;
MECHANICAL AND TRIBOLOGICAL PROPERTIES;
MICRO DRILLING;
MICRO DRILLS;
TA-C FILM;
TETRAHEDRAL AMORPHOUS CARBON (TA-C);
TETRAHEDRAL AMORPHOUS CARBON (TA-C) FILMS;
THROUGH-HOLE DRILLING;
TOOL PERFORMANCE;
TOOL WEAR;
WORK PIECES;
AMORPHOUS CARBON;
ARGON;
BOREHOLES;
CARBON FILMS;
COBALT;
DRILLS;
FRICTION;
MACHINING;
MECHANICAL PROPERTIES;
MICROHARDNESS;
PRINTED CIRCUIT BOARDS;
PRINTED CIRCUIT MANUFACTURE;
VACUUM;
VACUUM APPLICATIONS;
VACUUM TECHNOLOGY;
WEAR OF MATERIALS;
AMORPHOUS FILMS;
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EID: 77955231720
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/j.diamond.2010.02.002 Document Type: Article |
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Times cited : (25)
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References (19)
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