Chemical bond analysis of amorphous carbon films

Vacuum

Volumn 84, Issue 5, 2009, Pages 638-641

  Yamamoto, Kazuhiro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AES; Carbon film; MSIBD; Raman spectroscopy; sp3 bond; XPS

Indexed keywords

AES; DIAMOND-LIKE; FINE STRUCTURES; FREE CARBON; MASS-SEPARATED ION BEAMS; MSIBD; PEAK INTENSITY; PEAK POSITION; RAMAN SPECTRA; XPS;

AMORPHOUS CARBON; AMORPHOUS FILMS; AUGER ELECTRON SPECTROSCOPY; CHEMICAL BONDS; CHEMICAL MODIFICATION; ELECTRON ENERGY LOSS SPECTROSCOPY; ENERGY DISSIPATION; GRAPHITE; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON FILMS;

EID: 70649114415     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.10.016     Document Type: Article

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