Kinetic modeling of the charging of nonconducting walls in a low pressure radio frequency inductively coupled plasma

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 1, 1998, Pages 300-305

  Kortshagen, U ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032338376     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580986     Document Type: Article

References (20)

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