Nonconvex Hamiltonians in three dimensional level set simulations of the wet etching of silicon

Applied Physics Letters

Volumn 89, Issue 21, 2006, Pages

  Radjenović, Branislav ^a   Radmilović Radjenović, Marija ^b   Mitrić, Miodrag ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL SYMMETRY; ETCHING; SEMICONDUCTING SILICON; SET THEORY;

ETCHING RATE FUNCTION; HAMILTON-JACOBI EQUATION; SET FUNCTION; WET ETCHING;

HAMILTONIANS;

EID: 33845448918     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2388860     Document Type: Article

References (11)

1. S. Osher and J. A. Sethian, J. Comput. Phys. 79, 12 (1988).
2. R. Whitaker, Int. J. Comput. Vis. 29, 203 (1998).
3. J. Sethian, Level Set Methods and Fast Marching Methods: Evolving Interfaces in Computational Geometry, Fluid Mechanics, Computer Vision and Materials Sciences (Cambridge University Press, Cambridge, UK, 1998).
4. S. Osher and R. Fedkiw, Level Set Method and Dynamic Implicit Surfaces (Springer, New York, 2002).
5. J. Sethian, J. Comput. Phys. 169, 503 (2001).
6. R. Tsai and S. Osher, Commun. Math. Sci. 1, 623 (2003).
7. R. Fedkiw, G. Sapiro, and C. Shu, J. Comput. Phys. 185, 309 (2003).
8. B. Radjenović, J. K. Lee, and M. Radmilović- Radjenović, Comput. Phys. Commun. 174, 127 (2006).
9. M. Elwenspoek and H. V. Jansen, Silicon Micromachining (Cambridge University Press, Cambridge, UK, 2004).
10. T. J. Hubbard, Ph.D. thesis, California Institute of Technology, 1994 (http://etd.caltech.edu/etd/available/etd-09162005-134646).
11. K. Sato, M. Shikida, Y. Matsushima, T. Yamashiro, K. Asaumi, Y. Iriye, and M. Yamamoto, Sens. Actuators, A 64, 87 (1988).