Sparse field level set method for non-convex Hamiltonians in 3D plasma etching profile simulations

Computer Physics Communications

Volumn 174, Issue 2, 2006, Pages 127-132

  Radjenović, Branislav ^a   Lee, Jae Koo ^a   Radmilović Radjenović, Marija ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

3D simulations; Etching profile; Level set method; Non convex Hamiltonians; Plasma etching; Sparse field method

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ETCHING; HAMILTONIANS; TOPOLOGY;

3D SIMULATIONS; ETCHING PROFILE; LEVEL SET METHOD; NON-CONVEX HAMILTONIANS; SPARSE FIELD METHOD;

PLASMA ETCHING;

EID: 29144480144     PISSN: 00104655     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cpc.2005.09.010     Document Type: Article

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