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Thin Solid Films
Volumn 389, Issue 1-2, 2001, Pages 16-26
Ion-assisted pulsed magnetron sputtering deposition of ta-C films
(5)
Bugaev, S P
a
Podkovyrov, V G
a
Oskomov, K V
a
Smaykina, S V
a
Sochugov, N S
a
a
INSTITUTE OF HIGH CURRENT ELECTRONICS
(
Russian Federation
)
Author keywords
Graphite; Raman scattering; Sputtering
Indexed keywords
ADHESION; CATHODES; DIAMOND LIKE CARBON FILMS; GRAPHITE; ION BEAM ASSISTED DEPOSITION; MAGNETRON SPUTTERING; PLASMAS; RAMAN SCATTERING;
ION ASSISTED PULSED MAGNETRON SPUTTERING DEPOSITION;
DIAMOND FILMS;
EID
:
0035876750
PISSN
:
00406090
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1016/S0040-6090(01)00844-6
Document Type
:
Article
Times cited : (
43
)
References (
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.
