Semi-automatic tuning of PID gains for atomic force microscopes

Proceedings of the American Control Conference

Volumn , Issue , 2008, Pages 2684-2689

  Abramovitch, Daniel Y ^a   Hoen, Storrs ^a   Workman, Richard ^a  

^a AGILENT LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ATOMIC PHYSICS; ATOMS; BANDWIDTH; EXTREME ULTRAVIOLET LITHOGRAPHY; NATURAL FREQUENCIES;

ACTUATOR MODELS; ATOMIC FORCE MICROSCOPE; ATOMIC FORCE MICROSCOPES; PID GAINS; RESONANT FREQUENCIES; SEMI AUTOMATICS;

PROPORTIONAL CONTROL SYSTEMS;

EID: 52449101694     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2008.4586898     Document Type: Conference Paper

References (12)

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