Scanning probe lithography with real time position control interferometer

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2002-January, Issue , 2002, Pages 13-15

  Yao, B C ^a   Chien, F S S ^a   Chen, S ^a   Lui, P K W ^a   Peng, G S ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Atomic force microscopy; Interferometric lithography; Laser feedback; Laser stability; Optical interferometry; Oxidation; Position control; Prototypes; Scanning probe microscopy; Silicon

Indexed keywords

AMMONIUM HYDROXIDE; ANISOTROPIC ETCHING; ATOMIC FORCE MICROSCOPY; FEEDBACK; INTERFEROMETERS; INTERFEROMETRY; LITHOGRAPHY; NANOTECHNOLOGY; OXIDATION; SCANNING PROBE MICROSCOPY; SILICON;

INTERFEROMETRIC LITHOGRAPHY; LASER FEEDBACK; LASER STABILITY; OPTICAL INTERFEROMETRY; PROTOTYPES;

POSITION CONTROL;

EID: 70449710022     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2002.1032112     Document Type: Conference Paper

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