Preparation of microcrystalline silicon-carbon films

Solar Energy Materials and Solar Cells

Volumn 87, Issue 1-4, 2005, Pages 433-444

  Coscia, U ^a   Ambrosone, G ^a   Lettieri, S ^a   Maddalena, P ^a   Rigato, V ^b   Restello, S ^b   Bobeico, E ^c   Tucci, M ^c  

^a INFM   (Italy)

^b LABORATORI NAZIONALI DI LEGNARO   (Italy)

^c ENEA   (Italy)

Author keywords

Heterostructure; Microcrystalline silicon carbon; Optical absorption

Indexed keywords

CRYSTALLINE MATERIALS; ENERGY GAP; FILM GROWTH; HETEROJUNCTIONS; HYDROGENATION; LIGHT ABSORPTION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

DARK CONDUCTIVITY; DISCHARGE PARAMETERS; MICROCRYSTALLINE SILICON-CARBON; OPTICAL ENERGY GAP;

THIN FILMS;

EID: 17744369732     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2004.09.015     Document Type: Conference Paper

References (24)

1. J. Meier, R. Flickiger, H. Keppner, and A. Shah Appl. Phys. Lett. 65 1994 860 862
2. R. Platz, and S. Wagner Appl. Phys. Lett. 73 1998 1236 1238
3. Y. Matsumoto, G. Hirata, H. Takakura, H. Okamoto, and Y. Hamakawa J. Appl. Phys. 78 1990 6538 6543
4. S. Ghosh, A. Dasgupta, S. Ray, J. Appl. Phys. (1995) 3200-3207; A. Dasgupta, S.C. Saha, S. Ray, and R. Carius J. Mater. Res. 14 1999 2554 2559
5. S. Ghosh, A. Dasgupta, S. Ray, J. Appl. Phys. (1995) 3200-3207; A. Dasgupta, S.C. Saha, S. Ray, and R. Carius J. Mater. Res. 14 1999 2554 2559
6. F. Demichelis, C.F. Pirri, and E. Tresso Philos. Mag. B 66 1992 135 146
7. B. Goldstein, and C.R. Dickson Appl. Phys. Lett. 53 1988 2672 2674
8. U. Coscia, G. Ambrosone, S. Lettieri, P. Maddalena, P. Rava, and C. Minarini Thin Solid Films 427 2003 284 288
9. Y. Onuma, F. Nagaune, K. Kamimura, MRS Proceeding, vol. 34 1989, pp. 142-147
10. A. Matsuda, and K. Tanaka J. Non-Cryst. Solids 97-98 1987 1367 1374
11. W.B. Jackson, N.M. Amer, C. Boccara, and D. Fournier Appl. Opt. 20 1981 1333 1344
12. M. Tucci, E. Salurso, F. Roca, and F. Palma Thin Solid Films 403 2002 307 311
13. G.S. Higashi, Y.J. Chabal, G.W. Trucks, and K. Raghavachari Appl. Phys. Lett. 56 1990 656 658
14. G. Ambrosone, G. Barucca, U. Coscia, S. Ferrero, S. Lettieri, and P. Maddalena J. Non-Cryst. Solids 338-340 2004 163 167
15. S. Veprek, F.A. Sarott, and Z. Iqbal Phys Rev. B 36 1987 3344 3350
16. A. Poruba, Z. Remes, J. Sprinter, M. Vanecek, A. Fejfar, J. Kocka, J. Meier, P. Torres, A. Shah, Proceedings of Second World Conference and Exhibition on Photovoltaic Solar Energy Conversion, Vienna, 1998, pp. 781-784
17. G. Willeke, and R. Martins Philos. Mag. B 63 1991 79 86
18. M. Tzolov, F. Finger, R. Carius, and P. Hapke J. Appl. Phys. 81 1997 7376 7385
19. R. Fluckiger, J. Meier, M. Gotz, and A. Shah J. Appl. Phys. 77 1995 712 716
20. P. Torres, J. Meier, R. Fluckiger, U. Kroll, J.A. Annaselvan, H. Keppner, and A. Shah Appl. Phys. Lett. 69 1996 1373 1375
21. S.M. Sze, Semiconductor Devices: Physics and Technology, Wiley, New York, 1985, p. 97
22. M. Tucci, M. della Noce, E. Bobeico, F. Roca, G. de Cesare, and F. Palma Thin Solid Films 451-452 2004 355 360
23. M. Tucci, and R. De Rosa Solid State Electron. 44 2000 1315 1320
24. M. Taguchi, K. Kawamoto, S. Tsuge, T. Baba, H. Sakata, M. Morizane, K. Uchihashi, N. Nakamura, S. Kiyama, and O. Oota Prog. Photovolt. Res. Appl. 8 2000 503 513