Single-step, rapid low-temperature synthesis of Si quantum dots embedded in an amorphous SiC matrix in high-density reactive plasmas

Acta Materialia

Volumn 58, Issue 2, 2010, Pages 560-569

  Cheng, Qijin ^a   Xu, Shuyan ^b  

^a Ken)   (Australia)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c Ken)   (Australia)

Author keywords

Chemical vapor deposition; Inductively coupled plasmas; Quantum dots; Solar cells

Indexed keywords

CARBON CONTENT; CRYSTALLINE SI; HIGH GROWTH RATE; HIGH-DENSITY; HIGH-RATE GROWTH; HYDROGEN DILUTION; INNOVATIVE APPROACHES; LOW SUBSTRATE TEMPERATURE; LOW TEMPERATURE SYNTHESIS; MATRIX; NON EQUILIBRIUM; PHOTOVOLTAIC SOLAR CELLS; QUANTUM DOTS; REACTIVE MIXTURES; REACTIVE PLASMAS; SI QUANTUM DOT; SINGLE-STEP; TANDEM CELLS; THIRD GENERATION;

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; EPITAXIAL GROWTH; INDUCTIVELY COUPLED PLASMA; METHANE; PHOTORESISTS; PHOTOVOLTAIC CELLS; SILANES; SILICON; SILICON CARBIDE; SOLAR CELLS; SOLAR POWER GENERATION;

SEMICONDUCTOR QUANTUM DOTS;

EID: 70449473913     PISSN: 13596454     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.actamat.2009.09.034     Document Type: Article

References (46)

1. Xu M., Xu S., Chai J.W., Long J.D., and Ee Y.C. Appl Phys Lett 89 (2006) 251904
2. Sriraman S., Agrawal S., Aydil E.S., and Maroudas D. Nature (London) 418 (2002) 62
3. Fujiwara K., Pan W., Usami N., Sawada K., Tokairin M., Nose Y., et al. Acta Mater 54 (2006) 3191
4. Denysenko I.B., Ostrikov K., Xu S., Yu M.Y., and Diong C.H. J Appl Phys 94 (2003) 6097
5. Hwang N.M., and Kim D.Y. Int Mater Rev 49 (2004) 171
6. Kurokawa Y., Tomita S., Miyajima S., Yamada A., and Konagai M. Jpn J Appl Phys 46 (2007) L833
7. Conibeer G., Green M., Cho E.C., et al. Thin Solid Films 516 (2008) 6748
8. Lacombe A., Beaudoin F., Koshel D., Barba D., Martin F., and Ross G.G. Appl Phys Lett 94 (2009) 012112
9. Xu M., Xu S., Ee Y.C., Yong C., Chai J.W., Huang S.Y., et al. Mater Sci Eng B 128 (2006) 89
10. Cheng Q.J., Xu S., and Ostrikov K. J Phys Chem C 113 (2009) 14759
11. Song D.Y., Cho E.C., Conibeer G., Huang Y.D., Flynn C., and Green M.A. J Appl Phys 103 (2008) 083544
12. Trwoga P.F., Kenyon A.J., and Pitt C.W. J Appl Phys 83 (1998) 3789
13. Deng S.S., Wu X.L., and Yang S.H. Acta Mater 52 (2004) 1953
14. Basa D.K., Ambrosone G., and Coscia U. Nanotechnology 19 (2008) 415706
15. Ambrosone G., Coscia U., Lettieri S., Maddalena P., Minarini C., Ferrero S., et al. Thin Solid Films 451-452 (2004) 274
16. Chen T., Huang Y., Yang D., Carius R., and Finger F. Phys Status Solidi (RRL) 2 (2008) 160
17. Cheng Q.J., Xu S., Huang S.Y., and Ostrikov K. Cryst Growth Des 9 (2009) 2863
18. Cheng Q.J., Xu S., and Ostrikov K. J Mater Chem 19 (2009) 5134
19. Cheng Q.J., Xu S., and Ostrikov K. Nanotechnology 20 (2009) 215606
20. Xu S., Ostrikov K.N., Li Y., Tsakadze E.L., and Jones I.R. Phys Plasmas 8 (2001) 2549
21. Cheng Q.J., Xu S., Long J.D., and Ostrikov K. Appl Phys Lett 90 (2007) 173112
22. Song D.Y., Cho E.C., Conibeer G., Cho Y.H., Huang Y.D., Huang S.J., et al. J Vac Sci Technol B 25 (2007) 1327
23. Cheng Q.J., Long J.D., and Xu S. J Appl Phys 101 (2007) 094304
24. Cheng Q.J., Xu S., Long J.D., Ni Z.H., Rider A.E., and Ostrikov K. J Phys D: Appl Phys 41 (2008) 055406
25. Hotta Y., Toyoda H., and Sugai H. Thin Solid Films 515 (2007) 4983
26. Goldstein B., Dickson C.R., Campbell I.H., and Fauchet P.M. Appl Phys Lett 53 (1988) 2672
27. Zhao X., He X., Sun Y., Yi J., and Xiao P. Acta Mater 57 (2009) 893
28. Cheng Q.J., Xu S., Long J.D., Huang S.Y., and Guo J. Nanotechnology 18 (2007) 465601
29. Han D., Wang K., Owens J.M., Gedvilas L., Nelson B., Habuchi H., et al. J Appl Phys 93 (2003) 3776
30. Chew K., Rusli, Yoon S.F., Ahn J., Ligatchev V., Teo E.J., et al. J Appl Phys 92 (2002) 2937
31. Cabarrocas P.R.I. Phys Status Solidi (c) 1 (2004) 1115
32. Bailat J., Vallat-Sauvain E., Feitknecht L., Droz C., and Shah A. J Appl Phys 93 (2003) 5727
33. Liu C.C., Lee C., Cheng K.L., Cheng H.C., and Yew T.R. Appl Phys Lett 66 (1995) 168
34. Matsuda A. J Non-Cryst Solids 338-340 (2004) 1
35. Ostrikov K. Rev Mod Phys 77 (2005) 489
36. Ostrikov K.N., Yu M.Y., and Stenflo L. Phys Rev E 61 (2000) 782
37. Vladimirov S.V., Ostrikov K.N., Yu M.Y., and Stenflo L. Phys Rev E 58 (1998) 8046
38. Denysenko I.B., Long J.D., Rutkevych P.P., Azarenkov N.A., and Ostrikov K. J Appl Phys 95 (2004) 2713
39. Cvelbar U., Ostrikov K., Drenik A., and Mozetič M. Appl Phys Lett 92 (2008) 133505
40. Levchenko I., Rider A.E., and Ostrikov K. Appl Phys Lett 90 (2007) 193110
41. Cabarrocas P.R.I., Tran N.T., Djeridane Y., Abramov A., Johnson E., and Patriarche G. J Phys D: Appl Phys 40 (2007) 2258
42. Lee S.S., Ko M.S., Kim C.S., and Hwang N.M. J Cryst Growth 310 (2008) 3659
43. Bapat A., Gatti M., Ding Y.P., Campbell S.A., and Kortshagen U. J Phys D: Appl Phys 40 (2007) 2247
44. Koga K., Iwashita S., and Shiratani M. J Phys D: Appl Phys 40 (2007) 2267
45. Vladimirov S.V., Ostrikov K., Yu M.Y., and Morfill G.E. Phys Rev E 67 (2003) 036406
46. Ostrikov K., Denysenko I.B., Vladimirov S.V., Xu S., Sugai H., and Yu M.Y. Phys Rev E 67 (2003) 056408