Hydrogen-doped In2O3 transparent conducting oxide films prepared by solid-phase crystallization method

Journal of Applied Physics

Volumn 107, Issue 3, 2010, Pages

  Koida, Takashi ^a   Kondo, Michio ^a   Tsutsumi, Koichi ^b   Sakaguchi, Akio ^b   Suzuki, Michio ^b   Fujiwara, Hiroyuki ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b J A Woollam Japan Corporation   (Japan)

^c GIFU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS PHASE; AMORPHOUS TO CRYSTALLINE TRANSFORMATION; ANNEALING TEMPERATURES; AS-DEPOSITED FILMS; CARRIER DENSITY; CARRIER SCATTERING; CERAMIC TARGET; CHEMICAL STRUCTURE; CRYSTALLINE GRAINS; CRYSTALLINE MATRICES; CRYSTALLINE PHASIS; CRYSTALLIZED FILMS; DIELECTRIC FUNCTIONS; DRUDE MODELS; EFFECTIVE MASS; HALL MEASUREMENTS; HIGH ELECTRON MOBILITY; IN-VACUUM; IONIZED IMPURITY SCATTERING; OXYGEN DEFICIENCY; ROOM TEMPERATURE; SCATTERING PROCESS; SOLID PHASE CRYSTALLIZATION; STRUCTURAL REARRANGEMENT; TEMPERATURE DEPENDENT; TRANSPARENT CONDUCTING OXIDE FILMS;

AMORPHOUS FILMS; CONDUCTIVE FILMS; CRYSTALLINE MATERIALS; CRYSTALLIZATION; DOPING (ADDITIVES); ELECTRON MOBILITY; GALVANOMAGNETIC EFFECTS; HALL MOBILITY; INDIUM; OXYGEN; SCATTERING; SPECTROSCOPIC ELLIPSOMETRY; SURFACE CHEMISTRY; THERMAL DESORPTION; THERMAL DESORPTION SPECTROSCOPY; TITRATION; TRANSMISSION ELECTRON MICROSCOPY; TRANSPORT PROPERTIES;

OXIDE FILMS;

EID: 76949102390     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3284960     Document Type: Article

References (70)

1. P. Drude, Z. Phys. 0044-3328 1, 161 (1900).
2. I. Hamberg and C. G. Granqvist, J. Appl. Phys. 0021-8979 60, R123 (1986). 10.1063/1.337534
3. R. Groth, Phys. Status Solidi B 0370-1972 14, 69 (1966). 10.1002/pssb.19660140104
4. Y. Kanai, Jpn. J. Appl. Phys., Part 1 0021-4922 23, 127 (1984). 10.1143/JJAP.23.127
5. Y. Meng, X. Yang, H. Chen, J. Shen, Y. Jiang, Z. Zhang, and Z. Hua, Thin Solid Films 0040-6090 394, 218 (2001). 10.1016/S0040-6090(01)01142-7
6. Y. Yoshida, D. M. Wood, T. A. Gessert, and T. J. Coutts, Appl. Phys. Lett. 0003-6951 84, 2097 (2004). 10.1063/1.1687984
7. C. Warmsingh, Y. Yoshida, D. W. Readey, C. W. Teplin, J. D. Perkins, P. A. Parilla, L. M. Gedvilas, B. M. Keyes, and D. S. Ginley, J. Appl. Phys. 0021-8979 95, 3831 (2004). 10.1063/1.1646468
8. A. E. Delahoy and S. Y. Guo, J. Vac. Sci. Technol. A 0734-2101 23, 1215 (2005). 10.1116/1.1894423 (Pubitemid 43119271)
9. M. F. A. M. van Hest, M. S. Dabney, J. D. Perkins, D. S. Ginley, and M. P. Taylor, Appl. Phys. Lett. 0003-6951 87, 032111 (2005). 10.1063/1.1995957 (Pubitemid 41227616)
10. P. F. Newhouse, C. -H. Park, D. A. Keszler, J. Tate, and P. S. Nyholm, Appl. Phys. Lett. 0003-6951 87, 112108 (2005). 10.1063/1.2048829 (Pubitemid 41330876)
11. T. Koida and M. Kondo, Appl. Phys. Lett. 0003-6951 89, 082104 (2006). 10.1063/1.2337281 (Pubitemid 44286142)
12. X. Li, Q. Zhang, W. Miao, L. Huang, Z. Zhang, and Z. Hua, J. Vac. Sci. Technol. A 0734-2101 24, 1866 (2006). 10.1116/1.2333572 (Pubitemid 44376091)
13. T. Koida and M. Kondo, J. Appl. Phys. 0021-8979 101, 063705 (2007). 10.1063/1.2711768 (Pubitemid 46517015)
14. T. Koida and M. Kondo, J. Appl. Phys. 0021-8979 101, 063713 (2007). 10.1063/1.2712161 (Pubitemid 46517023)
15. J. A. A. Selvan, A. E. Delahoy, S. Guo, and Y. -M. Li, Sol. Energy Mater. Sol. Cells 0927-0248 90, 3371 (2006). 10.1016/j.solmat.2005.09.018 (Pubitemid 44332119)
16. A. E. Delahoy, L. Chen, M. Akhtar, B. Sang, and S. Guo, Sol. Energy 0038-092X 77, 785 (2004). 10.1016/j.solener.2004.08.012 (Pubitemid 39605887)
17. T. Miyano, R. Hashimoto, Y. Kanda, T. Mise, and T. Nakada, Proceedings of the Technical Digest of 17th International Photovoltaic Science and Engineering Conference, Fukuoka, December 2007 (unpublished), p. 806.
18. X. Wu, J. Zhou, A. Duda, J. C. Keane, T. A. Gessert, Y. Yan, and R. Noufi, Prog. Photovoltaics 1062-7995 14, 471 (2006). 10.1002/pip.664
19. J. W. Bowers, H. M. Upadhyaya, S. Calnan, R. Hashimoto, T. Nakada, and A. N. Tiwari, Prog. Photovoltaics 1062-7995 17, 265 (2008). 10.1002/pip.872
20. T. Koida, H. Fujiwara, and M. Kondo, Jpn. J. Appl. Phys., Part 2 0021-4922 46, L685 (2007). 10.1143/JJAP.46.L685 (Pubitemid 47245296)
21. T. Koida, H. Fujiwara, and M. Kondo, Appl. Phys. Express 1882-0778 1, 041501 (2008). 10.1143/APEX.1.041501
22. T. Koida, H. Sai, and M. Kondo, Thin Solid Films 0040-6090 (to be published)..
23. C. G. Van de Walle, Phys. Rev. Lett. 0031-9007 85, 1012 (2000). 10.1103/PhysRevLett.85.1012 (Pubitemid 30901766)
24. C. Kilic and A. Zunger, Appl. Phys. Lett. 0003-6951 81, 73 (2002). 10.1063/1.1482783 (Pubitemid 34783706)
25. A. Janotti and C. G. Van de Walle, Nature Mater. 1476-1122 6, 44 (2007). 10.1038/nmat1795 (Pubitemid 46041475)
26. H. Omura, H. Kumomi, K. Nomura, T. Kamiya, M. Hirano, and H. Hosono, J. Appl. Phys. 0021-8979 105, 093712 (2009). 10.1063/1.3089232
27. S. F. J. Cox, E. A. Davis, S. P. Cottrell, P. J. C. King, J. S. Lord, J. M. Gil, H. V. Alberto, R. C. Vilao, J. Piroto Duarte, N. Ayres de Campos, A. Weidinger, R. L. Lichti, and S. J. C. Irvine, Phys. Rev. Lett. 0031-9007 86, 2601 (2001). 10.1103/PhysRevLett.86.2601 (Pubitemid 32286713)
28. D. M. Hofmann, A. Hofstaetter, F. Leiter, H. Zhou, F. Henecker, B. K. Meyer, S. B. Orlinskii, J. Schmidt, and P. G. Baranov, Phys. Rev. Lett. 0031-9007 88, 045504 (2002). 10.1103/PhysRevLett.88.045504
29. Y. M. Strzhemechny, H. L. Mosbacker, D. C. Look, D. C. Reynolds, C. W. Litton, N. Y. Garces, N. C. Giles, L. E. Halliburton, S. Niki, and L. J. Brillson, Appl. Phys. Lett. 0003-6951 84, 2545 (2004). 10.1063/1.1695440
30. G. A. Shi, M. Stavola, S. J. Pearton, M. Thieme, E. V. Lavrov, and J. Weber, Phys. Rev. B 0163-1829 72, 195211 (2005). 10.1103/PhysRevB.72.195211 (Pubitemid 43033250)
31. S. Ishibashi, Y. Higuchi, Y. Ohta, and K. Nakamura, J. Vac. Sci. Technol. A 0734-2101 8, 1399 (1990). 10.1116/1.576889
32. Y. Shigesato, I. Yasui, Y. Hayashi, S. Takaki, T. Oyama, and M. Kamei, J. Vac. Sci. Technol. A 0734-2101 13, 268 (1995). 10.1116/1.579409
33. M. Ando, M. Takabatake, E. Nishimura, F. Leblanc, K. Onisawa, and T. Minemura, J. Non-Cryst. Solids 0022-3093 198-200, 28 (1996). 10.1016/0022-3093(95)00648-6 (Pubitemid 126356000)
34. E. Nishimura, M. Ando, K. Onisawa, M. Takabatake, and T. Minemura, Jpn. J. Appl. Phys., Part 1 0021-4922 35, 2788 (1996). 10.1143/JJAP.35.2788
35. B. H. Lee, I. G. Kim, S. W. Cho, and S. -H. Lee, Thin Solid Films 0040-6090 302, 25 (1997). 10.1016/S0040-6090(96)09581-8
36. I. L. Eisgruber, J. R. Engel, R. E. Hollingsworth, P. K. Bhat, and R. Wendt, J. Vac. Sci. Technol. A 0734-2101 17, 190 (1999). 10.1116/1.581572
37. E. Nishimura, H. Ohkawa, P. K. Song, and Y. Shigesato, Thin Solid Films 0040-6090 445, 235 (2003). 10.1016/S0040-6090(03)01168-4
38. K. Noda, H. Sato, H. Itaya, and M. Yamada, Jpn. J. Appl. Phys., Part 1 0021-4922 42, 217 (2003). 10.1143/JJAP.42.217
39. M. Ando, E. Nishimura, K. Onisawa, and T. Minemura, J. Appl. Phys. 0021-8979 93, 1032 (2003). 10.1063/1.1528298
40. Y. Shigesato, Y. Hayashi, and T. Haranoh, Appl. Phys. Lett. 0003-6951 61, 73 (1992). 10.1063/1.107673
41. H. Nakazawa, Y. Ito, E. Matsumoto, K. Adachi, N. Aoki, and Y. Ochiai, J. Appl. Phys. 0021-8979 100, 093706 (2006). 10.1063/1.2358829 (Pubitemid 44772581)
42. M. Mizuhashi, Thin Solid Films 0040-6090 70, 91 (1980). 10.1016/0040-6090(80)90415-0 (Pubitemid 11449394)
43. C. A. Pan and T. P. Ma, Appl. Phys. Lett. 0003-6951 37, 163 (1980). 10.1063/1.91809
44. Z. Ovadyahu, B. Ovryn, and H. W. Kraner, J. Electrochem. Soc. 0013-4651 130, 917 (1983). 10.1149/1.2119858
45. H. Fujiwara and M. Kondo, Phys. Rev. B 0163-1829 71, 075109 (2005). 10.1103/PhysRevB.71.075109 (Pubitemid 40410813)
46. P. I. Rovira and R. W. Collins, J. Appl. Phys. 0021-8979 85, 2015 (1999). 10.1063/1.369496
47. R. A. Synowicki, Thin Solid Films 0040-6090 313-314, 394 (1998). 10.1016/S0040-6090(97)00853-5
48. T. Koida, H. Fujiwara, and M. Kondo, J. Non-Cryst. Solids 0022-3093 354, 2805 (2008). 10.1016/j.jnoncrysol.2007.09.076
49. Y. Shigesato, Y. Hayashi, A. Masui, and T. Haranou, Jpn. J. Appl. Phys., Part 1 0021-4922 30, 814 (1991). 10.1143/JJAP.30.814
50. D. H. Zhang and H. L. Ma, Appl. Phys. A: Mater. Sci. Process. 0947-8396 62, 487 (1996). 10.1007/BF01567122
51. A. W. Ott, J. M. Johnson, J. W. Klaus, and S. M. George, Appl. Surf. Sci. 0169-4332 112, 205 (1997). 10.1016/S0169-4332(96)00977-4
52. J. R. Bellingham, W. A. Phillips, and C. J. Adkins, J. Phys.: Condens. Matter 0953-8984 2, 6207 (1990). 10.1088/0953-8984/2/28/011
53. R. Clanget, Appl. Phys. 0340-3793 2, 247 (1973). 10.1007/BF00889507
54. Y. Ohhata, F. Shinoki, and S. Yoshida, Thin Solid Films 0040-6090 59, 255 (1979). 10.1016/0040-6090(79)90298-0 (Pubitemid 10413230)
55. B. E. Sernelius, K. -F. Berffren, Z. -C. Jin, I. Hamberg, and C. G. Granqvist, Phys. Rev. B 0163-1829 37, 10244 (1988). 10.1103/PhysRevB.37.10244
56. T. Pisarkiewicz, K. Zakrzewska, and E. Leja, Thin Solid Films 0040-6090 174, 217 (1989). 10.1016/0040-6090(89)90892-4 (Pubitemid 20615878)
57. T. Nagatomo, Y. Maruta, and O. Omoto, Thin Solid Films 0040-6090 192, 17 (1990). 10.1016/0040-6090(90)90475-S
58. T. Minami, H. Sato, K. Ohashi, T. Tomofuji, and S. Takata, J. Cryst. Growth 0022-0248 117, 370 (1992). 10.1016/0022-0248(92)90778-H
59. S. Brehme, F. Fenske, W. Fuhs, E. Nebauer, M. Poschenrieder, B. Selle, and I. Sieber, Thin Solid Films 0040-6090 342, 167 (1999). 10.1016/S0040- 6090(98)01490-4
60. D. L. Young, T. J. Coutts, V. I. Kaydanov, A. S. Gilmore, and W. P. Mulligan, J. Vac. Sci. Technol. A 0734-2101 18, 2978 (2000). 10.1116/1.1290372 (Pubitemid 32033134)
61. M. Chen, Z. L. Pei, X. Wang, Y. H. Yu, X. H. Liu, C. Sun, and L. S. Wen, J. Phys. D: Appl. Phys. 0022-3727 33, 2538 (2000). 10.1088/0022-3727/33/20/304
62. A. V. Singh, R. M. Mehra, A. Yoshida, and A. Wakahara, J. Appl. Phys. 0021-8979 95, 3640 (2004). 10.1063/1.1667259
63. S. Muranaka, Y. Bando, and T. Takada, Thin Solid Films 0040-6090 151, 355 (1987). 10.1016/0040-6090(87)90134-9 (Pubitemid 18505117)
64. R. G. Dhere, T. A. Gessert, L. L. Schilling, A. J. Nelson, K. M. Jones, H. Aharoni, and T. J. Coutts, Solar Cells 21, 281 (1987). 10.1016/0379-6787(87) 90127-X
65. H. Morikawa, H. Sumi, and M. Kohyama, Thin Solid Films 0040-6090 281-282, 202 (1996). 10.1016/0040-6090(96)08613-0 (Pubitemid 126388073)
66. C. W. Ow-Yang, D. Spinner, Y. Shigesato, and D. C. Paine, J. Appl. Phys. 0021-8979 83, 145 (1998). 10.1063/1.366731
67. D. C. Paine, T. Whitson, D. Janiac, R. Beresford, C. O. Yang, and B. Lewis, J. Appl. Phys. 0021-8979 85, 8445 (1999). 10.1063/1.370695
68. A. Rogozin, N. Shevchenko, M. Vinnichenko, F. Prokert, V. Cantelli, A. Kolitsch, and W. Moller, Appl. Phys. Lett. 0003-6951 85, 212 (2004). 10.1063/1.1771456
69. T. A. Gessert, D. L. Williamson, T. J. Coutts, A. J. Nelson, K. M. Jones, R. G. Dhere, H. Aharoni, and P. Zurcher, J. Vac. Sci. Technol. A 0734-2101 5, 1314 (1987). 10.1116/1.574756
70. J. E. Bellingham, W. A. Phillips, and C. J. Adkins, Thin Solid Films 0040-6090 195, 23 (1991). 10.1016/0040-6090(91)90255-V