Intrinsic limit of electrical properties of transparent conductive oxide films

Journal of Physics D: Applied Physics

Volumn 33, Issue 20, 2000, Pages 2538-2548

  Chen, M ^a,b   Pei, Z L ^b   Wang, X ^a   Yu, Y H ^a   Liu, X H ^a   Sun, C ^b   Wen, L S ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b INSTITUTE OF METAL RESEARCH   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE SCATTERING; CARRIER CONCENTRATION; CARRIER MOBILITY; GRAIN BOUNDARIES; ION IMPLANTATION;

ACOUSTICAL DEFORMATION SCATTERING; GRAIN BOUNDARY POTENTIAL SCATTERING; ION IMPURITY SCATTERING; TRANSPARENT CONDUCTIVE OXIDE FILMS;

CONDUCTIVE FILMS;

EID: 0034294171     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/20/304     Document Type: Article

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