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Volumn 84, Issue 14, 2004, Pages 2545-2547

Remote hydrogen plasma doping of single crystal ZnO

(10) Strzhemechny, Yuri M a Mosbacker, Howard L a Look, David C b,c Reynolds, Donald C c Litton, Cole W c Garces, Nelson Y d Giles, Nancy C d Halliburton, Larry E d Niki, Shigeru e Brillson, Leonard J f

a OHIO STATE UNIVERSITY (United States)

b WRIGHT STATE UNIVERSITY (United States)

c AIR FORCE RESEARCH LABORATORY (United States)

d WEST VIRGINIA UNIVERSITY (United States)

e NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

f Ohio State University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR TRANSPORT (CVT) METHOD; DONOR BOUND EXCITONS; REMOTE PLASMA HYDROGENATION;

ANNEALING; CARRIER CONCENTRATION; CARRIER MOBILITY; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; ELECTRIC INSULATING MATERIALS; EPITAXIAL GROWTH; EXCITONS; HALL EFFECT; HYDROGENATION; LITHIUM; PHOTOLUMINESCENCE; PLASMA APPLICATIONS; SINGLE CRYSTALS; THIN FILMS;

ZINC OXIDE;

EID: 2342521249 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1695440 Document Type: Article

Times cited : (130)

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