Transparent and semitransparent conducting film deposition by reactive-environment, hollow cathode sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 4, 2005, Pages 1215-1220

  Delahoy, A E ^a   Guo, S Y ^a  

^a Energy Photovoltaics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODE SPUTTERING; DOPANTS; DOPING ELEMENTS;

CATHODES; CONCENTRATION (PROCESS); ELECTRIC CONDUCTIVITY; INDUCTIVELY COUPLED PLASMA; OPTICAL PROPERTIES; SPUTTER DEPOSITION; THIN FILMS; TRANSPARENCY; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

INDIUM COMPOUNDS;

EID: 31044432789     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1894423     Document Type: Conference Paper

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