Spectroscopic ellipsometry characterization of indium tin oxide film microstructure and optical constants

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 394-397

  Synowicki, R A ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

Graded microstructure; Indium tin oxide; ITO; Optical constants; Refractive index; Spectroscopic ellipsometry

Indexed keywords

ELLIPSOMETRY; MATHEMATICAL MODELS; MICROSTRUCTURE; OPTICAL VARIABLES MEASUREMENT; REFRACTIVE INDEX; SEMICONDUCTING FILMS; SEMICONDUCTING INDIUM COMPOUNDS; SPECTROSCOPIC ANALYSIS; TRANSPARENCY;

GRADED MICROSTRUCTURE; INDIUM TIN OXIDE; OPTICAL CONSTANTS;

OPTICAL FILMS;

EID: 0032001363     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00853-5     Document Type: Article

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