Development of novel tungsten-doped high mobility transparent conductive In2O3 thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 5, 2006, Pages 1866-1869

  Li, Xifeng ^a   Zhang, Qun ^a   Miao, Weina ^a   Huang, Li ^a   Zhang, Zhuangjian ^a   Hua, Zhongyi ^a  

^a FUDAN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CONDUCTIVE FILMS; DOPING (ADDITIVES); ELECTRON MOBILITY; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; TUNGSTEN; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

CRYSTALLINE STRUCTURE; GLASS SUBSTRATES; METALLIC TARGETS; TUNGSTEN DOPED INDIUM OXIDE (IWO);

THIN FILMS;

EID: 33748602391     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2333572     Document Type: Article

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