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Volumn 106, Issue 7, 2009, Pages

Nature of interfacial defects and their roles in strain relaxation at highly lattice mismatched 3C -SiC/Si (001) interface

Author keywords

[No Author keywords available]

Indexed keywords

HIGH RESOLUTION; IMAGE DECONVOLUTION; INTERFACIAL DEFECT; LATTICE-MISMATCHED; MICROSCOPIC IMAGE; MISFIT DEFECTS; MISFIT DISLOCATIONS; PARTIAL DISLOCATIONS; SHUFFLE DISLOCATIONS; STRAIN RELAXATION MECHANISM; STRUCTURE MAPS;

EID: 70350123077     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3234380     Document Type: Article
Times cited : (35)

References (54)
  • 4
    • 36049011211 scopus 로고    scopus 로고
    • Group III nitride and SiC based MEMS and NEMS: Materials properties, technology and applications
    • DOI 10.1088/0022-3727/40/20/S19, PII S0022372707430273
    • V. Cimalla, J. Pezoldt, and O. Ambacher, J. Phys. D 0022-3727 40, 6386 (2007). 10.1088/0022-3727/40/20/S19 (Pubitemid 350093023)
    • (2007) Journal of Physics D: Applied Physics , vol.40 , Issue.20 , pp. 6386-6434
    • Cimalla, V.1    Pezoldt, J.2    Ambacher, O.3
  • 6
    • 0001627677 scopus 로고    scopus 로고
    • 0021-8979,. 10.1063/1.366192
    • C. W. Liu and J. C. Sturm, J. Appl. Phys. 0021-8979 82, 4558 (1997). 10.1063/1.366192
    • (1997) J. Appl. Phys. , vol.82 , pp. 4558
    • Liu, C.W.1    Sturm, J.C.2
  • 14
    • 0032620185 scopus 로고    scopus 로고
    • 0021-8979,. 10.1063/1.371085
    • C. Long, S. A. Ustin, and W. Ho, J. Appl. Phys. 0021-8979 86, 2509 (1999). 10.1063/1.371085
    • (1999) J. Appl. Phys. , vol.86 , pp. 2509
    • Long, C.1    Ustin, S.A.2    Ho, W.3
  • 17
    • 58149210113 scopus 로고
    • 0254-0584,. 10.1016/0254-0584(95)01485-3
    • D. M. D. Hwang, Mater. Chem. Phys. 0254-0584 40, 291 (1995). 10.1016/0254-0584(95)01485-3
    • (1995) Mater. Chem. Phys. , vol.40 , pp. 291
    • Hwang, D.M.D.1
  • 18
    • 30344459724 scopus 로고    scopus 로고
    • Spatially resolved Raman spectroscopy evaluation of residual stresses in 3C-SiC layer deposited on Si substrates with different crystallographic orientations
    • DOI 10.1016/j.apsusc.2005.04.020, PII S0169433205006616
    • W. L. Zhu, J. L. Zhu, S. Nishino, and G. Pezzotti, Appl. Surf. Sci. 0169-4332 252, 2346 (2006). 10.1016/j.apsusc.2005.04.020 (Pubitemid 43054931)
    • (2006) Applied Surface Science , vol.252 , Issue.6 , pp. 2346-2354
    • Zhu, W.L.1    Zhu, J.L.2    Nishino, S.3    Pezzotti, G.4
  • 20
    • 0026170663 scopus 로고
    • 0304-3991,. 10.1016/0304-3991(91)90086-L
    • J. J. Hu and F. H. Li, Ultramicroscopy 0304-3991 35, 339 (1991). 10.1016/0304-3991(91)90086-L
    • (1991) Ultramicroscopy , vol.35 , pp. 339
    • Hu, J.J.1    Li, F.H.2
  • 23
    • 0031471759 scopus 로고    scopus 로고
    • Image deconvolution for defected crystals in field-emission high- resolution electron microscopy
    • DOI 10.1016/S0304-3991(97)00084-3, PII S0304399197000843
    • W. Z. He, F. H. Li, H. Chen, K. Kawasaki, and T. Oikawa, Ultramicroscopy 0304-3991 70, 1 (1997). 10.1016/S0304-3991(97)00084-3 (Pubitemid 28028227)
    • (1997) Ultramicroscopy , vol.70 , Issue.1-2 , pp. 1-11
    • He, W.Z.1    Li, F.H.2    Chen, H.3    Kawasaki, K.4    Oikawa, T.5
  • 24
    • 0034333322 scopus 로고    scopus 로고
    • Distinguishing glide and shuffle types for 60°dislocation in semicoductors by field-emission HREM image processing
    • DOI 10.1016/S0304-3991(00)00053-X, PII S030439910000053X
    • D. Wang, F. H. Li, and J. Zou, Ultramicroscopy 0304-3991 85, 131 (2000). 10.1016/S0304-3991(00)00053-X (Pubitemid 30734387)
    • (2000) Ultramicroscopy , vol.85 , Issue.3 , pp. 131-139
    • Wang, D.1    Li, F.H.2    Zou, J.3
  • 28
    • 0002170585 scopus 로고
    • 0021-8979,. 10.1063/1.1698233
    • O. Scherzer, J. Appl. Phys. 0021-8979 20, 20 (1949). 10.1063/1.1698233
    • (1949) J. Appl. Phys. , vol.20 , pp. 20
    • Scherzer, O.1
  • 29
    • 29444446406 scopus 로고    scopus 로고
    • Restoring atomic configuration at interfaces by image deconvolution
    • DOI 10.1093/jmicro/dfh107
    • C. Y. Tang and F. H. Li, J. Electron Microsc. 0022-0744 54, 445 (2005). 10.1093/jmicro/dfh107 (Pubitemid 43011843)
    • (2005) Journal of Electron Microscopy , vol.54 , Issue.5 , pp. 445-453
    • Tang, C.-Y.1    Li, F.-H.2
  • 32
    • 1842577587 scopus 로고    scopus 로고
    • Determination of a misfit dislocation complex in SiGe/Si heterostructures by image deconvolution technique in HREM
    • DOI 10.1016/j.ultramic.2003.08.019, PII S0304399103002055
    • D. Wang, J. Zou, W. Z. He, H. Chen, F. H. Li, K. Kawasaki, and T. Oikawa, Ultramicroscopy 0304-3991 98, 259 (2004). 10.1016/j.ultramic.2003.08.019 (Pubitemid 38444935)
    • (2004) Ultramicroscopy , vol.98 , Issue.2-4 , pp. 259-264
    • Wang, D.1    Zou, J.2    He, W.Z.3    Chen, H.4    Li, F.H.5    Kawasaki, K.6    Oikawa, T.7
  • 34
    • 21144472954 scopus 로고
    • 0141-8610,. 10.1080/01418619308225360
    • D. Gerthsen, Philos. Mag. A 0141-8610 67, 1365 (1993). 10.1080/01418619308225360
    • (1993) Philos. Mag. A , vol.67 , pp. 1365
    • Gerthsen, D.1
  • 36
    • 0036297996 scopus 로고    scopus 로고
    • Determination of crystal polarity from bend contours in transmission electron microscope images
    • DOI 10.1016/S0304-3991(02)00072-4, PII S0304399102000724
    • E. Spiecker, Ultramicroscopy 0304-3991 92, 111 (2002). 10.1016/S0304-3991(02)00072-4 (Pubitemid 34721339)
    • (2002) Ultramicroscopy , vol.92 , Issue.3-4 , pp. 111-132
    • Spiecker, E.1
  • 37
  • 41
    • 0030644024 scopus 로고    scopus 로고
    • 0232-1300,. 10.1002/crat.2170320111
    • M. Lazar and G. Wagner, Cryst. Res. Technol. 0232-1300 32, 111 (1997). 10.1002/crat.2170320111
    • (1997) Cryst. Res. Technol. , vol.32 , pp. 111
    • Lazar, M.1    Wagner, G.2
  • 43
    • 0642300006 scopus 로고
    • 0021-8979,. 10.1063/1.358772
    • J. Zou and D. J. H. Cockayne, J. Appl. Phys. 0021-8979 77, 2448 (1995). 10.1063/1.358772
    • (1995) J. Appl. Phys. , vol.77 , pp. 2448
    • Zou, J.1    Cockayne, D.J.H.2
  • 44
    • 0040787244 scopus 로고
    • 0022-3697,. 10.1016/0022-3697(58)90138-0
    • J. Hornstra, J. Phys. Chem. Solids 0022-3697 5, 129 (1958). 10.1016/0022-3697(58)90138-0
    • (1958) J. Phys. Chem. Solids , vol.5 , pp. 129
    • Hornstra, J.1
  • 48
    • 0030126018 scopus 로고    scopus 로고
    • 0884-2914,. 10.1557/JMR.1996.0110
    • X. J. Ning and P. Pirouz, J. Mater. Res. 0884-2914 11, 884 (1996). 10.1557/JMR.1996.0110
    • (1996) J. Mater. Res. , vol.11 , pp. 884
    • Ning, X.J.1    Pirouz, P.2
  • 52
    • 0001747776 scopus 로고
    • 0907-4449,. 10.1107/S0365110X57002194
    • J. M. Cowley and A. F. Moodie, Acta Crystallogr. 0907-4449 10, 609 (1957). 10.1107/S0365110X57002194
    • (1957) Acta Crystallogr. , vol.10 , pp. 609
    • Cowley, J.M.1    Moodie, A.F.2
  • 53
    • 21544469179 scopus 로고
    • 0021-8979,. 10.1063/1.354860
    • J. Zou and D. J. H. Cockayne, J. Appl. Phys. 0021-8979 74, 925 (1993). 10.1063/1.354860
    • (1993) J. Appl. Phys. , vol.74 , pp. 925
    • Zou, J.1    Cockayne, D.J.H.2
  • 54
    • 1342338488 scopus 로고
    • 0163-1829,. 10.1103/PhysRevB.49.8086
    • J. Zou and D. J. H. Cockayne, Phys. Rev. B 0163-1829 49, 8086 (1994). 10.1103/PhysRevB.49.8086
    • (1994) Phys. Rev. B , vol.49 , pp. 8086
    • Zou, J.1    Cockayne, D.J.H.2


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