메뉴 건너뛰기




Volumn 15, Issue 3, 2009, Pages 850-860

Development of GaN-based vertical-cavity surface-emitting lasers

Author keywords

Distributed Bragg reflector (DBR); Electrical pumping; GaN; Superlattice; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

BLUE WAVELENGTH; CONTINUOUS WAVE OPERATION; COUPLING EFFICIENCY; DEVICE STRUCTURES; DISTRIBUTED BRAGG REFLECTOR (DBR); DIVERGENCE ANGLE; ELECTRICAL PUMPING; ELECTRICALLY PUMPED; FABRICATION TECHNOLOGIES; GAN; HIGH QUALITY; HIGH REFLECTIVITY; INJECTION CURRENTS; LASING ACTION; NARROW-LINE WIDTH; OPTICALLY PUMPED; PERFORMANCE CHARACTERISTICS; POLARIZATION RATIOS; ROOM TEMPERATURE; VERTICAL-CAVITY SURFACE EMITTING LASER; VERTICAL-CAVITY SURFACE-EMITTING LASER (VCSEL);

EID: 67650931043     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2013181     Document Type: Article
Times cited : (36)

References (55)
  • 1
    • 84883188181 scopus 로고
    • P-type conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI)
    • H. Amano, M. Kito, K. Hiramatsu, and I. Akasaki, "P-type conduction in Mg-doped GaN treated with low-energy electron beam irradiation (LEEBI)," Jpn. J. Appl. Phys, vol. 28, pp. L2112-L2114, 1989.
    • (1989) Jpn. J. Appl. Phys , vol.28
    • Amano, H.1    Kito, M.2    Hiramatsu, K.3    Akasaki, I.4
  • 3
    • 0028385147 scopus 로고
    • Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes
    • S. Nakamura, T. Mukai, and M. Senoh, "Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes," Appl. Phys. Lett., vol. 64, pp. 1687-1689, 1994.
    • (1994) Appl. Phys. Lett , vol.64 , pp. 1687-1689
    • Nakamura, S.1    Mukai, T.2    Senoh, M.3
  • 7
    • 0026241977 scopus 로고
    • Highly p-typed Mg-doped GaN films grown with GaN buffer layers
    • S. Nakamura, M. Senoh, and T. Mukai, "Highly p-typed Mg-doped GaN films grown with GaN buffer layers," Jpn. J. Appl. Phys., vol. 30, pp. L1708-L1711, 1991.
    • (1991) Jpn. J. Appl. Phys , vol.30
    • Nakamura, S.1    Senoh, M.2    Mukai, T.3
  • 8
    • 0026867861 scopus 로고
    • Hole compensation mechanism of p-type GaN films
    • S. Nakamura, N. Iwasa, M. Senoh, and T. Mukai, "Hole compensation mechanism of p-type GaN films," Jpn. J. Appl. Phys., vol. 31, pp. 1258- 1266, 1992.
    • (1992) Jpn. J. Appl. Phys , vol.31 , pp. 1258-1266
    • Nakamura, S.1    Iwasa, N.2    Senoh, M.3    Mukai, T.4
  • 9
    • 0034313134 scopus 로고    scopus 로고
    • Surface-emitting laser - Its birth and generation of new optoelectronics field
    • Nov
    • K. Iga, "Surface-emitting laser - Its birth and generation of new optoelectronics field," IEEE J. Sel. Topics Quantum Electron., vol. 6, no. 6, pp. 1201-1215, Nov. 2000.
    • (2000) IEEE J. Sel. Topics Quantum Electron , vol.6 , Issue.6 , pp. 1201-1215
    • Iga, K.1
  • 10
    • 0031258734 scopus 로고    scopus 로고
    • Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers
    • Oct
    • W. W. Chow, K. D. Choquette, M. H. Crawford, K. L. Lear, and G. R. Hadley, "Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers," IEEE J. Quantum Electron., vol. 33, no. 10, pp. 1810-1824, Oct. 1997.
    • (1997) IEEE J. Quantum Electron , vol.33 , Issue.10 , pp. 1810-1824
    • Chow, W.W.1    Choquette, K.D.2    Crawford, M.H.3    Lear, K.L.4    Hadley, G.R.5
  • 11
    • 0034313091 scopus 로고    scopus 로고
    • A historical perspective of the development of the vertical-cavity surface-emitting laser
    • Nov./Dec
    • E. Towe, R. F. Leheny, and A. Yang, "A historical perspective of the development of the vertical-cavity surface-emitting laser," IEEE J. Sel. Topics Quantum Electron., vol. 6, no. 6, pp. 1458-1464, Nov./Dec. 2000.
    • (2000) IEEE J. Sel. Topics Quantum Electron , vol.6 , Issue.6 , pp. 1458-1464
    • Towe, E.1    Leheny, R.F.2    Yang, A.3
  • 14
    • 33645786110 scopus 로고    scopus 로고
    • Impact of inhomogeneous excitonic broadening on the strong exciton-photon coupling in quantum well nitride microcavities
    • G. Christmann, R. Butté, E. Feltin, J.-F. Carlin, and N. Grandjean, "Impact of inhomogeneous excitonic broadening on the strong exciton-photon coupling in quantum well nitride microcavities," Phys. Rev. B, vol. 73, pp. 153305-1-153305-4, 2006.
    • (2006) Phys. Rev. B , vol.73
    • Christmann, G.1    Butté, R.2    Feltin, E.3    Carlin, J.-F.4    Grandjean, N.5
  • 18
    • 0032290310 scopus 로고    scopus 로고
    • Lasing emission from an In0 .1Ga0 .9N vertical cavity surface emitting laser
    • T. Someya, K. Tachibana, J. Lee, T. Kamiya, and Y. Arakawa, "Lasing emission from an In0 .1Ga0 .9N vertical cavity surface emitting laser," Jpn. J. Appl. Phys., vol. 37, pp. L1424-L1426, 1998.
    • (1998) Jpn. J. Appl. Phys , vol.37
    • Someya, T.1    Tachibana, K.2    Lee, J.3    Kamiya, T.4    Arakawa, Y.5
  • 20
    • 0033578677 scopus 로고    scopus 로고
    • Room temperature lasing at blue wavelengths in gallium nitride microcavities
    • T. Someya, R. Werner, A. Forchel, M. Catalano, R. Cingolani, and Y. Arakawa, "Room temperature lasing at blue wavelengths in gallium nitride microcavities," Science, vol. 285, pp. 1905-1906, 1999.
    • (1999) Science , vol.285 , pp. 1905-1906
    • Someya, T.1    Werner, R.2    Forchel, A.3    Catalano, M.4    Cingolani, R.5    Arakawa, Y.6
  • 21
    • 17044379454 scopus 로고    scopus 로고
    • Crack-free fully epitaxial nitride microcavity using highly reflective AlInN/GaN Bragg mirrors
    • J.-F. Carlin, J. Dorsaz, E. Feltin, R. Butté, N. Grandjean, M. Ilegems, and M. Laügt, "Crack-free fully epitaxial nitride microcavity using highly reflective AlInN/GaN Bragg mirrors," Appl. Phys. Lett., vol. 86, pp. 031107-1-031107-3, 2005.
    • (2005) Appl. Phys. Lett , vol.86
    • Carlin, J.-F.1    Dorsaz, J.2    Feltin, E.3    Butté, R.4    Grandjean, N.5    Ilegems, M.6    Laügt, M.7
  • 24
    • 0041877443 scopus 로고    scopus 로고
    • Low-threshold lasing of InGaN vertical-cavity surface-emitting lasers with dielectric distributed Bragg reflectors
    • T. Tawara, H. Gotoh, T. Akasaka, N. Kobayashi, and T. Saitoh, "Low-threshold lasing of InGaN vertical-cavity surface-emitting lasers with dielectric distributed Bragg reflectors," Appl. Phys. Lett., vol. 83, pp. 830- 832, 2003.
    • (2003) Appl. Phys. Lett , vol.83 , pp. 830-832
    • Tawara, T.1    Gotoh, H.2    Akasaka, T.3    Kobayashi, N.4    Saitoh, T.5
  • 26
    • 33645660063 scopus 로고    scopus 로고
    • Room-temperature operation of optically pumped blue-violet GaN-based vertical-cavity surface-emitting lasers fabricated by laser lift-off
    • J.-T. Chu, T.-C. Lu, H.-H. Yao, C.-C. Kao, W.-D. Liang, J.-Y. Tsai, H.-C. Kuo, and S.-C. Wang, "Room-temperature operation of optically pumped blue-violet GaN-based vertical-cavity surface-emitting lasers fabricated by laser lift-off," Jpn. J. Appl. Phys, vol. 45, pp. 2556-2560, 2006.
    • (2006) Jpn. J. Appl. Phys , vol.45 , pp. 2556-2560
    • Chu, J.-T.1    Lu, T.-C.2    Yao, H.-H.3    Kao, C.-C.4    Liang, W.-D.5    Tsai, J.-Y.6    Kuo, H.-C.7    Wang, S.-C.8
  • 27
    • 33748961993 scopus 로고    scopus 로고
    • Emission characteristics of optically pumped GaN-based vertical-cavity surface-emitting lasers
    • J.-T. Chu, T.-C. Lu, M. You, B.-J. Su, C.-C. Kao, H.-C. Kuo, and S.-C. Wang, "Emission characteristics of optically pumped GaN-based vertical-cavity surface-emitting lasers," Appl. Phys. Lett., vol. 89, pp. 121112-1-121112-3, 2006.
    • (2006) Appl. Phys. Lett , vol.89
    • Chu, J.-T.1    Lu, T.-C.2    You, M.3    Su, B.-J.4    Kao, C.-C.5    Kuo, H.-C.6    Wang, S.-C.7
  • 31
    • 42149146838 scopus 로고    scopus 로고
    • CW lasing of current injection blue GaN-based vertical cavity surface emitting laser
    • T.-C. Lu, C.-C. Kuo, H.-C. Kuo, G.-S. Huang, and S.-C. Wang, "CW lasing of current injection blue GaN-based vertical cavity surface emitting laser," Appl. Phys. Lett., vol. 92, pp. 141102-1-141102-3, 2008.
    • (2008) Appl. Phys. Lett , vol.92
    • Lu, T.-C.1    Kuo, C.-C.2    Kuo, H.-C.3    Huang, G.-S.4    Wang, S.-C.5
  • 32
    • 0030975368 scopus 로고    scopus 로고
    • Nitride-based semiconductors for blue and green light-emitting devices
    • F. A. Ponce and D. P. Bour, "Nitride-based semiconductors for blue and green light-emitting devices," Nature, vol. 386, pp. 351-359, 1997.
    • (1997) Nature , vol.386 , pp. 351-359
    • Ponce, F.A.1    Bour, D.P.2
  • 34
    • 42349109729 scopus 로고    scopus 로고
    • The influence of mobility unbalance on GaN based vertical cavity surface emitting lasers
    • E. Petrolati and A. D. Carlo, "The influence of mobility unbalance on GaN based vertical cavity surface emitting lasers," Appl. Phys. Lett., vol. 92, pp. 151116-1-151116-3, 2008.
    • (2008) Appl. Phys. Lett , vol.92
    • Petrolati, E.1    Carlo, A.D.2
  • 35
    • 0347382992 scopus 로고    scopus 로고
    • S.Chichibu,T.Azuhata, T.Sota, andS.Nakamura, Spontaneous emission of localized excitons in InGaN single and multiquantum well structures, Appl. Phys. Lett., 69, pp. 4188-4190, 1996.
    • S.Chichibu,T.Azuhata, T.Sota, andS.Nakamura, "Spontaneous emission of localized excitons in InGaN single and multiquantum well structures," Appl. Phys. Lett., vol. 69, pp. 4188-4190, 1996.
  • 36
    • 0041511972 scopus 로고    scopus 로고
    • High-quality AlInN for high index contrast Bragg mirrors lattice matched to GaN
    • J.-F. Carlin and M. Ilegems, "High-quality AlInN for high index contrast Bragg mirrors lattice matched to GaN," Appl. Phys. Lett., vol. 83, pp. 668- 670, 2003.
    • (2003) Appl. Phys. Lett , vol.83 , pp. 668-670
    • Carlin, J.-F.1    Ilegems, M.2
  • 38
    • 31644442230 scopus 로고    scopus 로고
    • Recent progressin the growth ofhighly reflective intride-based distributed Bragg reflectors and their use in microcavities
    • R. Butté, E. Feltin, J. Dorsaz, G. Christmann, J.-F. Carlin, N. Grandjean, andM. Ilegems, "Recent progressin the growth ofhighly reflective intride-based distributed Bragg reflectors and their use in microcavities," Jpn. J. Appl. Phys., vol. 44, pp. 7207-7216, 2005.
    • (2005) Jpn. J. Appl. Phys , vol.44 , pp. 7207-7216
    • Butté, R.1    Feltin, E.2    Dorsaz, J.3    Christmann, G.4    Carlin, J.-F.5    Grandjean, N.6    andM7    Ilegems8
  • 39
    • 32444449733 scopus 로고    scopus 로고
    • Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition
    • G. S. Huang, T. C. Lu, H. H. Yao, H. C. Kuo, S. C. Wang, C.-W. Lin, and L. Chang, "Crack-free GaN/AlN distributed Bragg reflectors incorporated with GaN/AlN superlattices grown by metalorganic chemical vapor deposition," Appl. Phys. Lett., vol. 88, pp. 061904-1-061904-3, 2006.
    • (2006) Appl. Phys. Lett , vol.88
    • Huang, G.S.1    Lu, T.C.2    Yao, H.H.3    Kuo, H.C.4    Wang, S.C.5    Lin, C.-W.6    Chang, L.7
  • 40
    • 79956035306 scopus 로고    scopus 로고
    • Characterization of pit formation in III-nitrides grown by metalorganic chemical vapor deposition
    • H. K. Cho, J. Y. Lee, and G. M. Yang, "Characterization of pit formation in III-nitrides grown by metalorganic chemical vapor deposition," Appl. Phys. Lett., vol. 80, pp. 1370-1372, 2002.
    • (2002) Appl. Phys. Lett , vol.80 , pp. 1370-1372
    • Cho, H.K.1    Lee, J.Y.2    Yang, G.M.3
  • 41
    • 0011579775 scopus 로고    scopus 로고
    • Strain relaxation in AlGaN/GaN superlattices grown on GaN
    • S. Einfeldt, H. Heinke, V. Kirchner, and D. Hommel, "Strain relaxation in AlGaN/GaN superlattices grown on GaN," Appl. Phys. Lett., vol. 89, pp. 2160-2167, 2001.
    • (2001) Appl. Phys. Lett , vol.89 , pp. 2160-2167
    • Einfeldt, S.1    Heinke, H.2    Kirchner, V.3    Hommel, D.4
  • 42
    • 0001351051 scopus 로고    scopus 로고
    • Possibility of green/blue/UV surface emitting lasers
    • Mar, Paper Th-11, pp
    • K. Iga, "Possibility of green/blue/UV surface emitting lasers," in Proc. Int. Symp. Blue Laser Light Emitting Diodes, Mar., 1996, Paper Th-11, pp. 263-266.
    • (1996) Proc. Int. Symp. Blue Laser Light Emitting Diodes , pp. 263-266
    • Iga, K.1
  • 43
    • 33646700495 scopus 로고    scopus 로고
    • Crack-free fully epitaxial nitride microcavity with Al-GaN/GaN distributed Bragg reflectors and InGaN/GaN quantum wells
    • X. H. Zhang, S. J. Chua, W. Liu, L. S. Wang, A. M. Yong, and S. Y. Chow, "Crack-free fully epitaxial nitride microcavity with Al-GaN/GaN distributed Bragg reflectors and InGaN/GaN quantum wells," Appl. Phys. Lett., vol. 88, pp. 191111-1-191111-3, 2006.
    • (2006) Appl. Phys. Lett , vol.88
    • Zhang, X.H.1    Chua, S.J.2    Liu, W.3    Wang, L.S.4    Yong, A.M.5    Chow, S.Y.6
  • 44
    • 0032162748 scopus 로고    scopus 로고
    • Impact of planar microcavity effects on light extraction - Part I: Basic concepts and analytical trends
    • Sep
    • H. Benisty, H. De Neve, and C. Weisbuch, "Impact of planar microcavity effects on light extraction - Part I: Basic concepts and analytical trends," IEEE J. Quantum Electron., vol. 34, no. 9, pp. 1612-1631, Sep. 1998.
    • (1998) IEEE J. Quantum Electron , vol.34 , Issue.9 , pp. 1612-1631
    • Benisty, H.1    De Neve, H.2    Weisbuch, C.3
  • 45
    • 0032166999 scopus 로고    scopus 로고
    • Impact of planar microcavity effects on light extraction - Part II: Selected exact simulations and role of photon recycling
    • Sep
    • H. Benisty, H. De Neve, and C. Weisbuch, "Impact of planar microcavity effects on light extraction - Part II: Selected exact simulations and role of photon recycling," IEEE J. Quantum Electron., vol. 34, no. 9, pp. 1632- 1643, Sep. 1998.
    • (1998) IEEE J. Quantum Electron , vol.34 , Issue.9 , pp. 1632-1643
    • Benisty, H.1    De Neve, H.2    Weisbuch, C.3
  • 46
    • 0042812534 scopus 로고
    • GaAs micro-cavity quantum-well laser with enhanced coupling of spontaneous emission to the lasing mode
    • R. J. Horowicz, H. Heitmann, Y. Kadota, and Y. Yamamoto, "GaAs micro-cavity quantum-well laser with enhanced coupling of spontaneous emission to the lasing mode," Appl. Phys. Lett., vol. 61, pp. 393-395, 1992.
    • (1992) Appl. Phys. Lett , vol.61 , pp. 393-395
    • Horowicz, R.J.1    Heitmann, H.2    Kadota, Y.3    Yamamoto, Y.4
  • 47
    • 0001445002 scopus 로고
    • Microcavity semiconductor laser with enhanced spontaneous emission
    • Y. Yamamoto and S. Machida, "Microcavity semiconductor laser with enhanced spontaneous emission," Phys. Rev. A., vol. 44, pp. 657-668, 1991.
    • (1991) Phys. Rev. A , vol.44 , pp. 657-668
    • Yamamoto, Y.1    Machida, S.2
  • 48
    • 79956027826 scopus 로고    scopus 로고
    • Observation of enhanced spontaneous emission coupling factor in nitride-based vertical-cavity surface-emitting laser
    • S. Kako, T. Someya, and Y. Arakawa, "Observation of enhanced spontaneous emission coupling factor in nitride-based vertical-cavity surface-emitting laser," Appl. Phys. Lett., vol. 80, pp. 722-724, 2002.
    • (2002) Appl. Phys. Lett , vol.80 , pp. 722-724
    • Kako, S.1    Someya, T.2    Arakawa, Y.3
  • 52
    • 33846793001 scopus 로고    scopus 로고
    • Effects of built-in polarization on InGaN-GaN vertical-cavity surface-emitting lasers
    • Jan
    • J. Piprek, R. Farrell, S. DenBaars, and S. Nakamura, "Effects of built-in polarization on InGaN-GaN vertical-cavity surface-emitting lasers," IEEE Photon. Technol. Lett., vol. 18, no. 1, pp. 7-9, Jan. 2006.
    • (2006) IEEE Photon. Technol. Lett , vol.18 , Issue.1 , pp. 7-9
    • Piprek, J.1    Farrell, R.2    DenBaars, S.3    Nakamura, S.4
  • 53
    • 2442464834 scopus 로고    scopus 로고
    • Effects of electronic current overflow and inhomogeneous carrier distribution on InGaN quantum-well laser performance
    • Jan
    • Y.-K. Kuo and Y.-A. Chang, "Effects of electronic current overflow and inhomogeneous carrier distribution on InGaN quantum-well laser performance," IEEE J. Quantum Electron., vol. 40, no. 5, pp. 437-444, Jan. 2006.
    • (2006) IEEE J. Quantum Electron , vol.40 , Issue.5 , pp. 437-444
    • Kuo, Y.-K.1    Chang, Y.-A.2
  • 55
    • 0042823863 scopus 로고    scopus 로고
    • P. Maćkowiak, R. P. Sarza?a, M. Wasiak, and W. Nakwaski, Nitride VCSEL design for continuous-wave operation of higher-order optical modes, Appl. Phys. A, 77, pp. 761-768, 2003.
    • P. Maćkowiak, R. P. Sarza?a, M. Wasiak, and W. Nakwaski, "Nitride VCSEL design for continuous-wave operation of higher-order optical modes," Appl. Phys. A, vol. 77, pp. 761-768, 2003.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.