Studies of chlorine-oxygen plasmas and evidence for heterogeneous formation of ClO and ClO2

Journal of Applied Physics

Volumn 105, Issue 11, 2009, Pages

  Guha, Joydeep ^a,b   Donnelly, Vincent M ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b LAM RESEARCH CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIZED ALUMINUM; AUGER ELECTRON SPECTROMETERS; CL ATOMS; FEED GAS; HETEROGENEOUS FORMATION; LANGMUIR PROBE ANALYSIS; LANGMUIR-HINSHELWOOD; MIXED-GAS INDUCTIVELY COUPLED PLASMAS; MIXING RATIOS; NUMBER DENSITY; OXYGEN PLASMAS; PLASMA CHAMBERS; QUADRUPOLE MASS SPECTROMETER; RARE GAS; SURFACE DIAGNOSTICS;

ALUMINA; ATOMIC SPECTROSCOPY; ATOMS; CHLORINE; DESORPTION; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; INERT GASES; MASS SPECTROMETRY; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; OXYGEN; SPECTROMETERS; TELLURIUM COMPOUNDS; TRACE ANALYSIS;

LEAKAGE (FLUID);

EID: 67649519944     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3129543     Document Type: Article

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