Recombination reactions of oxygen atoms on an anodized aluminum plasma reactor wall, studied by a spinning wall method

Journal of Physical Chemistry B

Volumn 109, Issue 44, 2005, Pages 20989-20998

  Kurunczi, P F ^a,b   Guha, J ^a   Donnelly, V M ^a  

^a University of Houston   (United States)

^b VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DESORPTION SIGNALS; OXYGEN PLASMA; PLASMA REACTOR; SIGNAL DECAY;

ANODIC OXIDATION; BINDING ENERGY; MASS SPECTROMETERS; MATHEMATICAL MODELS; PLASMAS; REACTION KINETICS;

OXYGEN;

EID: 28144441079     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp054190h     Document Type: Article

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