Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2 and Cl number densities

Journal of Applied Physics

Volumn 88, Issue 11, 2000, Pages 6207-6215

  Malyshev, M V ^a,b   Donnelly, V M ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b MCKINSEY AND COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000899437     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1321777     Document Type: Article

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