Inductively coupled Cl2/O2 plasma: Experimental investigation and modelling

Vacuum

Volumn 75, Issue 3, 2004, Pages 237-246

  Efremov, A M ^a   Kim, Dong Pyo ^a   Kim, Chang Il ^a  

^a Chung Ang University   (South Korea)

Author keywords

Dissociation; Electron density; Electron temperature; Ionisation; Plasma

Indexed keywords

BINARY MIXTURES; CARRIER CONCENTRATION; CHARGED PARTICLES; CHLORINATION; CHLORINE; DISSOCIATION; MIXING; OXYGEN; REACTION KINETICS;

PLASMA PARAMETERS; VOLUME DENSITIES;

INDUCTIVELY COUPLED PLASMA;

EID: 2942692134     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2004.03.005     Document Type: Article

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