Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled O2 plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 3, 2008, Pages 455-461

  Stafford, Luc ^a   Guha, Joydeep ^a   Donnelly, Vincent M ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OXYGEN ATOMS; PLASMA CHAMBERS; SILICA DISCHARGE TUBE;

CHEMICAL REACTORS; COATING TECHNIQUES; GAS DISCHARGE TUBES; INDUCTIVELY COUPLED PLASMA; STAINLESS STEEL;

OXYGEN;

EID: 42949152424     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2902953     Document Type: Article

References (33)