Microhotplates with TiN heaters

Sensors and Actuators, A: Physical

Volumn 148, Issue 2, 2008, Pages 416-421

  Creemer, J F ^a,c   Briand, D ^b   Zandbergen, H W ^c   van der Vlist, W ^a   de Boer, C R ^a   de Rooij, N F ^b   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Heater; Microhotplates; Pt; TiN

Indexed keywords

CHEMICAL REACTORS; CRYSTAL MICROSTRUCTURE; GRAIN SIZE AND SHAPE; MELTING POINT; MODEL STRUCTURES; NITRIDES; PLATINUM; POLYSILICON; SILICON; SILICON NITRIDE; THERMOCHEMISTRY; TIN; TITANIUM; TITANIUM COMPOUNDS;

AVERAGE TEMPERATURES; CMOS PROCESSES; GRAIN STRUCTURES; HEATER; HIGH STRESSES; HIGHER TEMPERATURES; LOW STRESSES; MICROHOTPLATES; MICROREACTORS; PT; SILICON NITRIDE (SIN; SPUTTERING PARAMETERS; STRESS MIGRATIONS; TEMPERATURE COEFFICIENT OF RESISTANCES; TEMPERATURE SENSING; TWO TYPES;

TITANIUM NITRIDE;

EID: 56549105666     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.08.016     Document Type: Article

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